Process and realization of a three-dimensional gold electroplated antenna on a flexible epoxy film for wireless micromotion system
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[1] J.A. Von Arx,et al. On-chip coils with integrated cores for remote inductive powering of integrated microsystems , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).
[2] Bernd Loechel. Thick-layer resists for surface micromachining , 2000 .
[3] Jane M. Shaw,et al. Micromachining applications of a high resolution ultrathick photoresist , 1995 .
[4] On-chip spiral inductors with patterned ground shields for Si-based RF ICs , 1998 .
[5] K.-L. Krieger,et al. A new passive CMOS telemetry chip to receive power and transmit data for a wide range of sensor applications , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).
[6] M. Mehregany,et al. High-aspect-ratio photolithography for MEMS applications , 1995 .
[7] Robert Puers,et al. Electrodeposited copper inductors for intraocular pressure telemetry , 2000 .
[8] F. Rudolf,et al. Electrodeposition of 3D microstructures on silicon , 1993 .
[9] Didier Lippens,et al. Terahertz time-domain spectroscopy of films fabricated from SU-8 , 1999 .
[10] Peter Vettiger,et al. High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMS , 1998 .
[11] N. D. Rooij,et al. High aspect ratio UV photolithography for electroplated structures , 1999 .
[12] Göran Stemme,et al. A robust micro conveyer realized by arrayed polyimide joint actuators1A robust micro conveyer realiz , 2000 .
[13] Herbert Reichl,et al. High depth to width aspect ratios in thick positive photoresist layers using near UV lithography , 1992 .
[14] Hiroyuki Fujita,et al. Fabrication and operation of polyimide bimorph actuators for a ciliary motion system , 1993 .
[15] Tayfun Akin,et al. A wireless implantable multichannel digital neural recording system for a micromachined sieve electrode , 1998, IEEE J. Solid State Circuits.
[16] W. Liu,et al. A neuro-stimulus chip with telemetry unit for retinal prosthetic device , 2000, IEEE Journal of Solid-State Circuits.