论文信息 - Loss reduction of silicon slot waveguides with ALD grown thin films

Loss reduction of silicon slot waveguides with ALD grown thin films

We present our studies on slot waveguides clad with atomic layer deposition (ALD). We show reduction of propagation loss in silicon slot waveguides. With an ALD grown titania thin film cladding, propagation loss as low as 7 dB/cm for a deep-UV patterned slot waveguide is achieved.

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