论文信息 - Effect of CH 4 flow rate on the optical properties of Boron-doped a-SiC:H films: Effect of CH 4 flow rate on the optical properties of Boron-doped a-SiC:H films - 字舞流文

Effect of CH 4 flow rate on the optical properties of Boron-doped a-SiC:H films: Effect of CH 4 flow rate on the optical properties of Boron-doped a-SiC:H films

J. Chu | Yongqian Wang | Q. Qiao | Xiaojiao Chen | Y. Dou | Yue He | Xiao-guang Ma | Robin Chen