Automatic EB fault tracing system by successive circuit extraction from VLSI CAD layout data

An automatic electron beam (EB) fault tracing system is described which enables us to trace faults automatically from the top level cell to the lowest primitive cell and from the primitive cell to the transistor-level circuit independently of circuit functions. Only VLSI CAD layout data is required.

[1]  H. Fujioka,et al.  Electron Beam Testing , 1989 .

[2]  Katsuyoshi Miura,et al.  Automatic Transistor-Level Performance Fault Tracing by Successive Circuit Extraction from CAD Layout Data for VLSI in the CAD-Linked EB Test System , 1995 .

[3]  Katsuyoshi Miura,et al.  Hierarchical fault tracing for VLSI sequential circuits from CAD layout data in the CAD-linked EB test system , 1997, Proceedings of ASP-DAC '97: Asia and South Pacific Design Automation Conference.

[4]  M. Marzouki,et al.  Fully automatic VLSI diagnosis in a CAD-linked E-beam probing system , 1988 .

[5]  Hideo Todokoro,et al.  E-beam fault diagnosis system for logic VLSIs , 1992 .

[6]  Bernard Courtois,et al.  Towards Automatic Failure Analysis of Complex ICs Through E-Beam Testing , 1986, ITC.

[7]  Katsuyoshi Miura,et al.  Hierarchical VLSI Fault Tracing by Successive Circuit Extraction from CAD Layout Data in the CAD-Linked EB Test System , 1997, J. Electron. Test..

[8]  Wojciech Maly,et al.  VLSI Design for Manufacturing: Yield Enhancement , 1989 .

[9]  Katsuyoshi Miura,et al.  Hierarchical Fault Tracing for VLSIs with Bi-directional Busses from CAD Layout Data in the CAD-Linked EB Test System , 1997 .

[10]  Norio Kuji,et al.  Automated Fault Diagnostic EB Tester and Its Application to a 40K-Gate VLSI Circuit , 1985, ITC.

[11]  Arthur Hu,et al.  New approach to integrate LSI design databases with e-beam tester , 1990, Proceedings. International Test Conference 1990.

[12]  Katsuyoshi Miura,et al.  A New Approach for VLSI Testing with CAD-Linked Electron Beam Test System , 1995 .

[13]  Alan C. Noble.  IDA: A TOOL FOR COMPUTER-AIDED FAILURE ANALYSIS , 1992, Proceedings International Test Conference 1992.

[14]  K. Miura.  Automatic tracing of transistor-level performance faults with CAD-linked electron beam test system , 1994 .

[15]  Bernard Courtois,et al.  An integrated debugging system based on E-beam test , 1988 .

[16]  Koji Nakamae,et al.  LSI Failure Analysis with CAD-Linked Electron Beam Test System and Its Cost Evaluation (Special Issue on LSI Failure Analysis) , 1994 .