论文信息 - Design and Analysis of a Monolithic 3-Axis Micro-Accelerometer

Design and Analysis of a Monolithic 3-Axis Micro-Accelerometer

Due to many inherently problems of accelerometers on market, such as complex fabrication process and low precision, a monolithic three-axis accelerometer is proposed and fabricated. The 3-axis accelerometer consists of four individual seismic mass, each has a wafer-thick of 240μm and is fabricated by anisotropic wet etching technology. In this paper, the design, fabrication, and characterization of the 3-axis accelerometer are presented. The performance is characterized and demonstrated.

Zhi Hua Chen | Ding Bang Xiao | Xing Hua Wang | Xue Zhong Wu

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