DynamicOptical Techniques forICDebugandFailure Analysis

implementation atCNES,theinterest tohavedifferent Optical techniques (light emission andlaserstimulation techniques onthesamesystem, andthemodifications provided techniques) areroutinely usedforprecise ICdefect localization. onthesystem. Finally theresults obtained on0.18ptmtest Attheearly stage ofananalysis, choosing theright technique is vehicle. Somecasesarepresented tofocusontechnique anincreasingly complex task. Insomecases, onetechnique complementaries. maybring value butnotheothers. Usinga180nmtest structure device wewill present results showing thecomplementary of 2.Dynamic techniques Emission Microscopy (EMMI),Time-Resolved EmissionThermal LaserStimulation (TRE)andDynamic Laser Stimulation (DLS)inorder tohelp Static Laser Stimulation (e.g. OBIRCH[1], TIVA[2], LIVA Failure Analysists orDebugengineers tochoose theright[3]...) andDynamic Laser Stimulation (e.g. RIL[4], SDL[5], approach.