Large-format fabrication by two-photon polymerization in SU-8

Microporous structures are central to many fields of science and engineering, but many of these systems are complex with little or no symmetry and are difficult to fabricate. We applied two-photon polymerization (2PP) and femtosecond laser direct-writing techniques to fabricate broad-area large-format 3D microporous structures (450 μm × 450 μm × 40 μm) in the epoxy-based photoresist SU-8. The appropriate exposure was determined by controlling average pulse energies and stage speeds to generate the exposure curves. Mechanical distortion exhibited in suspended walls fabricated by 2PP laser writing was studied by controlling wall lengths and widths. A simple thermal-expansion model is presented to explain the distortion caused by axial loadings of the walls.

[1]  W. R. Dean.  On the Theory of Elastic Stability , 1925 .

[2]  Yoh-Han Pao,et al.  LASER‐INDUCED PRODUCTION OF FREE RADICALS IN ORGANIC COMPOUNDS , 1965 .

[3]  D A Parthenopoulos,et al.  Three-Dimensional Optical Storage Memory , 1989, Science.

[4]  J. Strickler,et al.  Three-dimensional optical data storage in refractive media by two-photon point excitation. , 1991, Optics letters.

[5]  Jeffrey D. Gelorme,et al.  High-aspect-ratio resist for thick-film applications , 1995, Advanced Lithography.

[6]  Jane M. Shaw,et al.  Micromachining applications of a high resolution ultrathick photoresist , 1995 .

[7]  S. Kawata,et al.  Three-dimensional microfabrication with two-photon-absorbed photopolymerization. , 1997, Optics letters.

[8]  M. Despont,et al.  SU-8: a low-cost negative resist for MEMS , 1997 .

[9]  Steven J. Holmes,et al.  Negative photoresists for optical lithography , 1997, IBM J. Res. Dev..

[10]  Charles R. Martin,et al.  Sol−Gel Template Synthesis of Semiconductor Oxide Micro- and Nanostructures , 1997 .

[11]  Paras N. Prasad,et al.  Three-dimensional optical circuitry using two-photon-assisted polymerization , 1999 .

[12]  Francis M. Houlihan.  Advances in Resist Technology and Processing XVII , 2000 .

[13]  J. Ye,et al.  Real three-dimensional microstructures fabricated by photopolymerization of resins through two-photon absorption. , 2000, Optics letters.

[14]  A. Schilling,et al.  Biologically and chemically optimized composites of carbonated apatite and polyglycolide as bone substitution materials. , 2001, Journal of biomedical materials research.

[15]  Satoshi Kawata,et al.  Finer features for functional microdevices , 2001, Nature.

[16]  J. Gilman,et al.  Nanotechnology , 2001 .

[17]  Pál Ormos,et al.  Complex micromachines produced and driven by light , 2001, CLEO 2002.

[18]  N. Fang,et al.  Near-field two-photon nanolithography using an apertureless optical probe , 2002 .

[19]  Theodore H. Fedynyshyn,et al.  Advances in Resist Technology and Processing XIX , 2002 .

[20]  Satoshi Kawata,et al.  Submicron diamond-lattice photonic crystals produced by two-photon laser nanofabrication , 2003 .

[21]  Satoshi Kawata,et al.  Two-photon photopolymerization as a tool for making micro-devices , 2003 .

[22]  Satoshi Kawata,et al.  Two-photon laser precision microfabrication and its applications to micro-nano devices and systems , 2003 .

[23]  B N Chichkov,et al.  Femtosecond laser-induced two-photon polymerization of inorganic-organic hybrid materials for applications in photonics. , 2003, Optics letters.

[24]  R. Feng,et al.  Influence of processing conditions on the thermal and mechanical properties of SU8 negative photoresist coatings , 2002 .

[25]  J.-Y. Lin,et al.  Fabricating high-aspect-ratio sub-diffraction-limit structures on silicon with two-photon photopolymerization and reactive ion etching , 2004 .

[26]  Aleksandr Ovsianikov,et al.  Fabrication of woodpile structures by two-photon polymerization and investigation of their optical properties. , 2004, Optics express.

[27]  Saulius Juodkazis,et al.  Three-dimensional microfabrication by femtosecond pulses in dielectrics , 2004 .

[28]  Olaf A. Cirpka,et al.  Large‐scale sandbox experiment on longitudinal effective dispersion in heterogeneous porous media , 2004 .

[29]  Saulius Juodkazis,et al.  Two-photon lithography of nanorods in SU-8 photoresist , 2005 .

[30]  Ngoc Diep Lai,et al.  Fabrication of two- and three-dimensional periodic structures by multi-exposure of two-beam interference technique. , 2005, Optics express.

[31]  W. H. Teh,et al.  Effect of low numerical-aperture femtosecond two-photon absorption on (SU-8) resist for ultrahigh-aspect-ratio microstereolithography , 2005 .

[32]  H. Kong,et al.  Direct single-layered fabrication of 3D concavo–convex patterns in nano-stereolithography , 2006 .

[33]  Wenhao Huang,et al.  Micro lens fabrication by means of femtosecond two photon photopolymerization. , 2006, Optics express.

[34]  A. Barsella,et al.  Optical components based on two-photon absorption process in functionalized polymers , 2006 .

[35]  Lionel Buchaillot,et al.  Variation of absorption coefficient and determination of critical dose of SU-8 at 365 nm , 2006 .

[36]  Satoshi Kawata,et al.  Three-dimensional fabrication of metallic nanostructures over large areas by two-photon polymerization. , 2006, Optics express.

[37]  Dong-Yol Yang,et al.  TWO-PHOTON STEREOLITHOGRAPHY , 2007 .

[38]  Nicholas J. Giordano,et al.  Measurement of interfacial area per volume for drainage and imbibition , 2007 .

[39]  Stephen Barlow,et al.  65 nm feature sizes using visible wavelength 3-D multiphoton lithography. , 2007, Optics express.

[40]  D. Nolte,et al.  Toward 3D Microfluidic Structures Fabricated with Two-photon Laser Machining , 2007, 2007 Conference on Lasers and Electro-Optics (CLEO).

[41]  D. Nolte,et al.  Relating capillary pressure to interfacial areas , 2008 .

[42]  H. Kong,et al.  Highly effective three-dimensional large-scale microfabrication using a continuous scanning method , 2008 .

[43]  A. Brzezinski,et al.  Three dimensional silicon-air photonic crystals with controlled defects using interference lithography , 2008 .

[44]  R. Rosenfeld.  Nature , 2009, Otolaryngology--head and neck surgery : official journal of American Academy of Otolaryngology-Head and Neck Surgery.