论文信息 - IMAGING PROPERTIES OF PLANAR-INTEGRATED MICRO-OPTICS

IMAGING PROPERTIES OF PLANAR-INTEGRATED MICRO-OPTICS

The properties of planar-integrated imaging systems are studied on the basis of algebraic ray tracing. A third-order approximation yields analytical expressions for ray aberrations in the image plane. Ray aberrations are compared with the diffraction-limited spot size to estimate optimum system performance from the minimum of the second moment of the point-spread function. We use as a figure of merit the space–bandwidth product of the planar imaging setups. The investigation is restricted to imaging systems consisting of three optical elements.

Jürgen Jahns | Markus E. Testorf | M. Testorf | J. Jahns

[1] Jürgen Jahns,et al. Imaging with planar optical systems , 1990 .

[2] R A Lilly,et al. Ray-matrix approach for diffractive optics. , 1993, Applied optics.

[3] E. Kley,et al. Fabrication of microprisms for planar optical interconnections by use of analog gray-scale lithography with high-energy-beam-sensitive glass. , 1999, Applied optics.

[4] A. Walther,et al. Eikonal theory and computer algebra II , 1996 .

[5] G. Schulz. Primary aberration-free imaging by three refracting surfaces , 1980 .

[6] Noah Bareket,et al. Second moment of the diffraction point spread function as an image quality criterion , 1979 .

[7] J Jahns,et al. Integrated optical imaging system. , 1990, Applied optics.

[8] C. W. Harris. Optical design by a matrix method , 1950 .

[9] Jürgen Jahns,et al. Paraxial theory of planar integrated systems , 1997 .

[10] William G. Fastie,et al. A Small Plane Grating Monochromator , 1952 .

[11] Abe Offner,et al. New Concepts in Projection Mask Aligners , 1975 .

[12] W. T. Welford,et al. VI Aberration Theory of Gratings and Grating Mountings , 1965 .

[13] Richard Barakat,et al. The Aberrations of Non-rotationally Symmetric Systems and Their Diffraction Effects , 1966 .

[14] A Huang,et al. Planar integration of free-space optical components. , 1989, Applied optics.