Effect of Laser Power on the Quality of Drilled Micro Hole Using Cu50Zr50 Amorphous Alloys Foils

The rapid growth of the micro-electro-mechanical systems (MEMS) is being driven by the rapid development of the micro manufacturing processes. Laser beam machining is one of the micro manufacturing processes which can shape almost all ranges of engineering materials. In this study, the effect of laser power on the quality of drilled micro holes using Cu50Zr50 amorphous alloys foils is experimentally investigated. It indicates that both entrance and exit circularities diameters increase with laser power. The circularities of the holes at the entry and the exit are in the range of 0.893 to 0.997. The taper of drilled holes increases quickly to a stable value with the increase of laser power from 60 to 110 W, then decreases quickly when the laser power becomes larger than 170 W. The micro holes with a diameter of 400 to 1200 μm are manufactured successfully by laser drilling processes. The formation mechanism of the quality of the laser drilled hole is analyzed based on the laser beam and the properties of amorphous alloys foils.

[1]  A. Takeuchi,et al.  Recent development and application products of bulk glassy alloys , 2011 .

[2]  Changrui Wang,et al.  Densification and mechanical properties of boron carbide with micro-hole array by micro-powder injection molding , 2014 .

[3]  P. Liaw,et al.  A study on the surface structures and properties of Ni-free Zr-based bulk metallic glasses after Ar and Ca ion implantation , 2013 .

[4]  Dong Wang,et al.  A study on micro-hole machining of polycrystalline diamond by micro-electrical discharge machining , 2011 .

[5]  Gang Li,et al.  Wf/Zr41.2Ti13.8Cu12.5Ni10Be22.5 bulk metallic glass composites prepared by a new melt infiltrating method , 2010 .

[6]  Graham Matthews,et al.  Recent Developments in Sprayers for Application of Biopesticides—an Overview , 2003 .

[7]  S. N. Aqida,et al.  Laser micro-processing of amorphous and partially crystalline Cu45Zr48Al7 alloy , 2010 .

[8]  J. Schroers.  Processing of Bulk Metallic Glass , 2010, Advanced materials.

[9]  Kai Ding,et al.  Experimental studies on drilling tool load and machining quality of C/SiC composites in rotary ultrasonic machining , 2014 .

[10]  C. Liao,et al.  Noncrystalline micromachining of amorphous alloys using femtosecond laser pulses , 2007 .

[11]  H. Murthy,et al.  Characterization of hole circularity and heat affected zone in pulsed CO2 laser drilling of alumina ceramics , 2013 .

[12]  M. Fiaschi,et al.  Experimental characterization of the inner surface in micro-drilling of spray holes: A comparison between ultrashort pulsed laser and EDM , 2014 .

[13]  Bin Guo,et al.  Blanking clearance and grain size effects on micro deformation behavior and fracture in micro-blanking of brass foil , 2012 .

[14]  Riping Liu,et al.  Wear resistance of Zr-based bulk metallic glass applied in bearing rollers , 2004 .

[15]  J. F. Tu,et al.  Experimental characterization of a micro-hole drilling process with short micro-second pulses by a CW single-mode fiber laser , 2014 .

[16]  Ulf Engel,et al.  Microforming—from basic research to its realization , 2002 .

[17]  Jehnming Lin,et al.  The characterization of the hole-contour and plume ejection in the laser drilling with various inclination angles , 2013 .

[18]  Mohan Edirisinghe,et al.  Formulation of a ceramic ink for a wide-array drop-on-demand ink-jet printer , 2003 .

[19]  Yuanyuan Zheng,et al.  The research on micro-punching by laser-driven flyer , 2012 .

[20]  James S. Horwitz,et al.  Miniature valveless ultrasonic pumps and mixers , 2000 .

[21]  J. Meijer.  Laser Beam Machining (LBM), State of the Art and new Opportunities , 2004 .

[22]  Vinod Yadava,et al.  Laser beam machining—A review , 2008 .

[23]  Chengyong Wang,et al.  Characteristics of chip formation in the micro-drilling of multi-material sheets , 2012 .

[24]  Jian-hua Zhang,et al.  Dynamic fracture characteristics of Fe78Si9B13 metallic glass subjected to laser shock loading , 2013 .

[25]  P. Liaw,et al.  Corrosion resistance and biocompatibility of Ni-free Zr-based bulk metallic glass for biomedical applications , 2012 .

[26]  Weihua Wang,et al.  Bulk metallic glasses , 2004 .