论文信息 - Laser deposition of CN/sub x/ films combined with RF and hollow cathode discharges - 字舞流文

Laser deposition of CN/sub x/ films combined with RF and hollow cathode discharges

M. Jelínek | J. Zemek | M. Trchová | V. Vorlíček | J. Lančok | M. Šimečková