Micro-machined array probe card

A membrane probe card designed for high speed, high pin count testing has been fabricated with conventional IC technology on a silicon wafer and its functionality demonstrated. A novel method of breaking down interfacial oxide, as a replacement for mechanical scrubbing, is proposed and demonstrated. The probe card can consistently provide contact resistance of <2 Omega , has greatly reduced parasitics, is capable of elevated temperature testing, and offers controlled impedance striplines of 50 Omega to the probe tips.<<ETX>>