论文信息 - Digital pattern generator for polynomially bordered shape primitives

Digital pattern generator for polynomially bordered shape primitives

Abstract We have designed a new Digital Pattern Generator for electron beam lithography applications which is able to generate polynomially bordered shape primitives by hard wired logic. This Pattern Generator has been built and the basic functions have been tested. In connection with an offline spline interpolation program, this device allows the fast generation of deflection signals for structures with arbitrarily curved borders.

Dieter P. Kern | F. E. Prins | S. Strähle | K.-D. Schock

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