论文信息 - Electrostatic pull-in behavior in 50g force balanced MEMS accelerometer

Electrostatic pull-in behavior in 50g force balanced MEMS accelerometer

This paper is presenting on the study of the electrostatic pull-in behaviors through simulation for 50g force balanced accelerometer. The simulation deals with several structures based on capacitive accelerometer type using Coventorware 2001.3. Analysis interest is to analyze the electrostatic force pull-in magnitude generated by applying DC voltage to the stator electrodes, and proofmass pull-in displacement for different configurations.

B.Y. Majlis | A. Alabqari

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