论文信息 - High-temperature annealing induced evolution of strain in AlN epitaxial films grown on sapphire substrates - 字舞流文

High-temperature annealing induced evolution of strain in AlN epitaxial films grown on sapphire substrates

Z. Qin | X. Kang | X. L. Yang | F. J. Xu | B. Shen | X. Q. Wang | B. Liu | Y. H. Sun | M. X. Wang | Ning Xie | W. Ge