Fabrication of a peristaltic micro pump with novel cascaded actuators

This paper presents the fabrication of an all-PDMS (polydimethylsiloxane) micro pump with novel cascaded actuators as dynamic valves. The micro pump consists of three pneumatic actuators in series and a micro fluidic channel connecting two fluidic inlet and outlet ports. The three-layer bonded pump structure is fabricated through a typical moulding process of PDMS and a simple heating process for the PDMS-to-PDMS bonding. The total size of the micro pump is 5 mm × 5 mm. The dynamic valve pattern of the single actuator is observed under various operational conditions of the square-wave input signal for the estimation of its volume stroke. The maximum volume stroke of the pneumatic actuator for liquid is about 85% of the volume of the liquid chamber. Three types of liquid-pumping tests are performed for characterization of the micro pump such as backpressure, frequency and viscous liquids. The flow rate of the de-ionized (DI) water is about 73.9 nl min−1 at zero backpressure. As the hydraulic difference between inlet and outlet ports increases, the flow rate gradually decreases. In the case of the frequency responses, the micro pump has the maximum flow rate of the DI water at 2 Hz. The viscosity-dependent flow rate of the working fluids is also observed.

[1]  Nam-Trung Nguyen,et al.  Miniature valveless pumps based on printed circuit board technique , 2001 .

[2]  C. Cabuz,et al.  The dual diaphragm pump , 2001, Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090).

[3]  K. Najafi,et al.  A fully integrated high-efficiency peristaltic 18-stage gas micropump with active microvalves , 2007, 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS).

[4]  O. Jeong,et al.  Fabrication and test of a micro electromagnetic actuator , 2005 .

[5]  Eui-Hyeok Yang,et al.  A technique for quantitative determination of the profile of the residual stress along the depth of p+ silicon films , 1995 .

[6]  Zhaoying Zhou,et al.  Study on a PZT-actuated diaphragm pump for air supply for micro fuel cells , 2006 .

[7]  Peter Woias,et al.  A novel two-stage backpressure-independent micropump: modeling and characterization , 2007 .

[8]  Peter Woias,et al.  A generic analytical model for micro-diaphragm pumps with active valves , 2005 .

[9]  Alan G. R. Evans,et al.  Investigation for the operation of an integrated peristaltic micropump , 2004 .

[10]  Ok Chan Jeong,et al.  Correlation between Residual Stress and Boron Concentration in Boron-Doped Silicon Films , 2005 .

[11]  Chang Liu,et al.  Design and prototyping of a surface micromachined parylene microvalve with hybrid actuation scheme: On-chip thermopneumatic initiation and electrostatic latching , 2005 .

[12]  Satoshi Konishi,et al.  Fabrication and drive test of pneumatic PDMS micro pump , 2007 .

[13]  S. Quake,et al.  Monolithic microfabricated valves and pumps by multilayer soft lithography. , 2000, Science.

[14]  O. Jeong,et al.  A phase-change type micropump with aluminum flap valves , 2003 .

[15]  Göran Stemme,et al.  A valve-less planar fluid pump with two pump chambers , 1995 .