Fabrication of a peristaltic micro pump with novel cascaded actuators
暂无分享,去创建一个
[1] Nam-Trung Nguyen,et al. Miniature valveless pumps based on printed circuit board technique , 2001 .
[2] C. Cabuz,et al. The dual diaphragm pump , 2001, Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090).
[3] K. Najafi,et al. A fully integrated high-efficiency peristaltic 18-stage gas micropump with active microvalves , 2007, 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS).
[4] O. Jeong,et al. Fabrication and test of a micro electromagnetic actuator , 2005 .
[5] Eui-Hyeok Yang,et al. A technique for quantitative determination of the profile of the residual stress along the depth of p+ silicon films , 1995 .
[6] Zhaoying Zhou,et al. Study on a PZT-actuated diaphragm pump for air supply for micro fuel cells , 2006 .
[7] Peter Woias,et al. A novel two-stage backpressure-independent micropump: modeling and characterization , 2007 .
[8] Peter Woias,et al. A generic analytical model for micro-diaphragm pumps with active valves , 2005 .
[9] Alan G. R. Evans,et al. Investigation for the operation of an integrated peristaltic micropump , 2004 .
[10] Ok Chan Jeong,et al. Correlation between Residual Stress and Boron Concentration in Boron-Doped Silicon Films , 2005 .
[11] Chang Liu,et al. Design and prototyping of a surface micromachined parylene microvalve with hybrid actuation scheme: On-chip thermopneumatic initiation and electrostatic latching , 2005 .
[12] Satoshi Konishi,et al. Fabrication and drive test of pneumatic PDMS micro pump , 2007 .
[13] S. Quake,et al. Monolithic microfabricated valves and pumps by multilayer soft lithography. , 2000, Science.
[14] O. Jeong,et al. A phase-change type micropump with aluminum flap valves , 2003 .
[15] Göran Stemme,et al. A valve-less planar fluid pump with two pump chambers , 1995 .