Ultra-compact silicon photonic devices reconfigured by an optically induced semiconductor-to-metal transition.

Vanadium dioxide (VO(2)) is a promising reconfigurable optical material and has long been a focus of condensed matter research owing to its distinctive semiconductor-to-metal phase transition (SMT), a feature that has stimulated recent development of thermally reconfigurable photonic, plasmonic, and metamaterial structures. Here, we integrate VO(2) onto silicon photonic devices and demonstrate all-optical switching and reconfiguration of ultra-compact broadband Si-VO(2) absorption modulators (L < 1 μm) and ring-resonators (R ~ λ(0)). Optically inducing the SMT in a small, ~0.275 μm(2), active area of polycrystalline VO(2) enables Si-VO(2) structures to achieve record values of absorption modulation, ~4 dB μm(-1), and intracavity phase modulation, ~π/5 rad μm(-1). This in turn yields large, tunable changes to resonant wavelength, |Δλ(SMT)| ~ 3 nm, approximately 60 times larger than Si-only control devices, and enables reconfigurable filtering and optical modulation in excess of 7 dB from modest Q-factor (~10(3)), high-bandwidth ring resonators (>100 GHz). All-optical integrated Si-VO(2) devices thus constitute platforms for reconfigurable photonics, bringing new opportunities to realize dynamic on-chip networks and ultrafast optical shutters and modulators.

[1]  M. Paniccia,et al.  A continuous-wave Raman silicon laser , 2005, Nature.

[2]  T Kawanishi,et al.  Ultrafast all-optical switching by cross-absorption modulation in silicon wire waveguides. , 2005, Optics express.

[3]  Richard F. Haglund,et al.  Optical nonlinearities in VO2 nanoparticles and thin films , 2004 .

[4]  Rob Ilic,et al.  All optical reconfiguration of optomechanical filters. , 2012, Nature communications.

[5]  R. F. Haglund,et al.  Ultrafast insulator-metal phase transition in VO 2 studied by multiterahertz spectroscopy , 2011, 1104.2984.

[6]  J. C. Kieffer,et al.  Evidence for a structurally-driven insulator-to-metal transition in VO 2 : A view from the ultrafast timescale , 2004, cond-mat/0403214.

[7]  J C Grossman,et al.  Strain engineering and one-dimensional organization of metal-insulator domains in single-crystal vanadium dioxide beams. , 2009, Nature nanotechnology.

[8]  Byung-Gyu Chae,et al.  Memory Metamaterials , 2009, Science.

[9]  S. Fourmaux,et al.  Optical switching in VO2 films by below-gap excitation , 2008 .

[10]  J. Leuthold,et al.  Nonlinear silicon photonics , 2010 .

[11]  Xiang Zhang,et al.  A graphene-based broadband optical modulator , 2011, Nature.

[12]  H. Bandulet,et al.  Phase diagram of the ultrafast photoinduced insulator-metal transition in vanadium dioxide , 2012 .

[13]  M. Kawasaki,et al.  Collective bulk carrier delocalization driven by electrostatic surface charge accumulation , 2012, Nature.

[14]  H. Atwater,et al.  Frequency tunable near-infrared metamaterials based on VO2 phase transition. , 2009, Optics express.

[15]  J. D. Ryckman,et al.  Low mode volume slotted photonic crystal single nanobeam cavity in silicon , 2012, The 9th International Conference on Group IV Photonics (GFP).

[16]  C. N. Berglund,et al.  Optical Properties of VO2between 0.25 and 5 eV , 1968 .

[17]  H. Ehrke,et al.  Coherent structural dynamics and electronic correlations during an ultrafast insulator-to-metal phase transition in VO2. , 2007, Physical review letters.

[18]  Joyeeta Nag,et al.  Synthesis of vanadium dioxide thin films and nanoparticles , 2008 .

[19]  R. Miller,et al.  Hot electron injection driven phase transitions , 2012 .

[20]  Harry A Atwater,et al.  Compact silicon photonic waveguide modulator based on the vanadium dioxide metal-insulator phase transition. , 2010, Optics express.

[21]  Qianfan Xu,et al.  Micrometre-scale silicon electro-optic modulator , 2005, Nature.

[22]  A. Cavalleri,et al.  Femtosecond Structural Dynamics in VO2 during an Ultrafast Solid-Solid Phase Transition. , 2001, Physical review letters.

[23]  Byung-Gyu Chae,et al.  Mott Transition in VO2 Revealed by Infrared Spectroscopy and Nano-Imaging , 2007, Science.

[24]  Qianfan Xu,et al.  All-optical logic based on silicon micro-ring resonators. , 2007, Optics express.

[25]  Heng Ji,et al.  Hydrogen stabilization of metallic vanadium dioxide in single-crystal nanobeams , 2012 .

[26]  Joyce K. S. Poon,et al.  Sub-volt broadband hybrid plasmonic-vanadium dioxide switches , 2012, 1210.0785.

[27]  Joyeeta Nag,et al.  Electron-beam deposition of vanadium dioxide thin films , 2013 .

[28]  Matteo Rini,et al.  Photoinduced phase transition in VO2 nanocrystals: ultrafast control of surface-plasmon resonance. , 2004, Optics letters.

[29]  J. Cunningham,et al.  Thermally tunable silicon racetrack resonators with ultralow tuning power. , 2010, Optics express.

[30]  R. Haglund,et al.  Ultrafast changes in lattice symmetry probed by coherent phonons , 2010, Nature Communications.

[31]  Ying Luo,et al.  30GHz Ge electro-absorption modulator integrated with 3 μm silicon-on-insulator waveguide. , 2011, Optics express.

[32]  Doron Rubin,et al.  High Speed Metal–Oxide–Semiconductor Capacitor-Based Silicon Optical Modulators , 2006 .

[33]  A Yariv,et al.  Control of critical coupling in a ring resonator-fiber configuration: application to wavelength-selective switching, modulation, amplification, and oscillation. , 2001, Optics letters.

[34]  W. Pernice,et al.  Dynamic manipulation of nanomechanical resonators in the high-amplitude regime and non-volatile mechanical memory operation. , 2011, Nature nanotechnology.

[35]  Kevin Wang,et al.  Decoupling of structural and electronic phase transitions in VO2. , 2012, Physical review letters.

[36]  Yan Zhang,et al.  Analysis of “on” and “off” times for thermally driven VO2 metal-insulator transition nanoscale switching devices , 2011 .

[37]  Gokul Gopalakrishnan,et al.  Electrical triggering of metal-insulator transition in nanoscale vanadium oxide junctions , 2009 .

[38]  T. Baehr‐Jones,et al.  Harnessing optical forces in integrated photonic circuits , 2008, Nature.

[39]  Engineering,et al.  Non-congruence of thermally driven structural and electronic transitions in VO2 , 2010 .

[40]  Federico Capasso,et al.  Ultra-thin perfect absorber employing a tunable phase change material , 2012 .

[41]  Armando Rúa,et al.  Insulator-to-metal phase transition and recovery processes in V O 2 thin films after femtosecond laser excitation , 2007 .

[42]  Joyeeta Nag,et al.  Photothermal optical modulation of ultra-compact hybrid Si-VO₂ ring resonators. , 2012, Optics express.

[43]  F. Diederich,et al.  All-optical high-speed signal processing with silicon–organic hybrid slot waveguides , 2009 .

[44]  Jenny Clark,et al.  Organic photonics for communications , 2010 .

[45]  Xin Zhang,et al.  Terahertz-field-induced insulator-to-metal transition in vanadium dioxide metamaterial , 2012, Nature.