Study on metal/p-GaN contacts on p-i-n GaN-based UV detectors

The contact of p-GaN was formed under different annealing condition, and its effect on p-i-n GaN-based detectors was studied by current-voltage (I-V) measurements and the response spectra. The parameters of metal/p-GaN interface were obtained by fitting the forward I-V curves. The results show that ideal factor of metal-semiconductor ( M-S) contacts annealed at 550°C for 3min is about 1.19, which means the formation of good ohmic contacts at the M-S interface and leads a lower turn-on voltage. But metal/p-GaN contacts have no obvious effect on response spectra of detectors.