Measurement of the mechanical properties of nickel film based on the full-field deformation: An improved blister method

To characterize the mechanical properties of thin films, an improved blister method is proposed, which combines a digital speckle correlation method with the blister test. Based on this method, an experimental setup is developed to measure Young's modulus, residual stress, and interfacial adhesion energy of an electroplated nickel film. The results show that the improved blister method has the advantage of a high accuracy full-field measurement with the simple operation and low requirement on environments, which can be used to characterize the mechanical properties of films with various scales from laboratorial to industrial applications.

[1]  J. Drezet,et al.  A new interpretation of bulge test measurements using numerical simulation , 1996 .

[2]  Joost J. Vlassak,et al.  A new bulge test technique for the determination of Young’s modulus and Poisson’s ratio of thin films , 1992 .

[3]  Hongjian Shi,et al.  Accurate 3D measurement system and calibration for speckle projection method , 2010 .

[4]  T. Hashida,et al.  Determination of Interface Fracture Toughness in Thermal Barrier Coating System by Blister Tests , 2003 .

[5]  X. Yao,et al.  Full-field deformation measurement of fiber composite pressure vessel using digital speckle correlation method , 2005 .

[6]  A. Gent,et al.  Blow-Off Pressures for Adhering Layers. , 1987 .

[7]  J. L. Martin,et al.  Characterisation of TiN thin films using the bulge test and the nanoindentation technique , 1997 .

[8]  A. Karimi,et al.  Comparison of mechanical properties of TiN thin films using nanoindentation and bulge test , 1998 .

[9]  G. Pharr,et al.  Measurement of hardness and elastic modulus by instrumented indentation: Advances in understanding and refinements to methodology , 2004 .

[10]  G. Pharr,et al.  The correlation of the indentation size effect measured with indenters of various shapes , 2002 .

[11]  Zengsheng Ma,et al.  On the intrinsic hardness of a metallic film/substrate system: Indentation size and substrate effects , 2012 .

[12]  J. Maibach,et al.  A new analytical solution for the load-deflection of square membranes , 1995 .

[13]  Fuhua Yang,et al.  Bulge testing and fracture properties of plasma-enhanced chemical vapor deposited silicon nitride thin films , 2009 .

[14]  Haitao Yan,et al.  Used digital speckle correlation method to realize orientation function of optical mouse , 2008 .

[15]  M. Verdier,et al.  Mechanical cross-characterization of sputtered inconel thin films for MEMS applications , 2007 .

[16]  Hong Miao,et al.  Bulge deformation measurement and elastic modulus analysis of nanoporous alumina membrane using time sequence speckle pattern interferometry , 2005 .

[17]  William D. Nix,et al.  Analysis of the accuracy of the bulge test in determining the mechanical properties of thin films , 1992 .

[18]  O. Tabata,et al.  Mechanical property measurements of thin films using load-deflection of composite rectangular membranes , 1989 .

[19]  Frans Spaepen,et al.  Tensile testing of free-standing Cu, Ag and Al thin films and Ag/Cu multilayers , 2000 .

[20]  Hung-Yi Lin,et al.  Mechanical properties of polymer thin film measured by the bulge test , 2007 .

[21]  J. Kysar,et al.  Plane-strain bulge test for nanocrystalline copper thin films , 2007 .

[22]  Yichun Zhou,et al.  A novel blister test to evaluate the interface strength between nickel coating and low carbon steel substrate , 2009 .

[23]  K. Tu,et al.  Mechanical property measurement of thin polymeric-low dielectric-constant films using bulge testing method , 2000 .

[24]  H. Suo,et al.  Effect of TRT process on GFA, mechanical properties and microstructure of Zr-based bulk metallic glass , 2011 .

[25]  John B. Shoven,et al.  I , Edinburgh Medical and Surgical Journal.

[26]  M. Kakihana,et al.  Materials Research Society Symposium - Proceedings , 2000 .

[27]  J. Vlassak,et al.  Measuring Interfacial Fracture Toughness With The Blister Test , 1996 .

[28]  A. Verbruggen,et al.  Young’s modulus measurements and grain boundary sliding in free-standing thin metal films , 2001 .

[29]  R. L. Edwards,et al.  Comparison of tensile and bulge tests for thin-film silicon nitride , 2004 .

[30]  Tingting Liu,et al.  Effects of scandium addition on microstructure and mechanical properties of ZK60 alloy , 2011 .

[31]  H. Youssef,et al.  Methods to improve reliability of bulge test technique to extract mechanical properties of thin films , 2010, Microelectron. Reliab..

[32]  K. Liechti,et al.  A calibrated fracture process zone model for thin film blistering , 1998 .

[33]  Yichun Zhou,et al.  A pressurized blister test model for the interface adhesion of dissimilar elastic-plastic materials , 2008 .

[34]  Chi-Jia Tong,et al.  Novel Microtensile Method for Monotonic and Cyclic Testing of Freestanding Copper Thin Films , 2010 .

[35]  Yong Xia,et al.  High-temperature deformation field measurement by combining transient aerodynamic heating simulation system and reliability-guided digital image correlation , 2010 .

[36]  G. G. Stokes "J." , 1890, The New Yale Book of Quotations.

[37]  R. Mountain,et al.  A technique for the determination of stress in thin films , 1983 .

[38]  Chunsheng Lu,et al.  Characterization of the interface adhesion of elastic―plastic thin film/rigid substrate systems using a pressurized blister test numerical model , 2010 .

[39]  M. Thouless An analysis of spalling in the microscratch test , 1998 .