Nanosize ferroelectric oxides – tracking down the superparaelectric limit

Free ferroelectric nanoparticles in the order of 10 nm undergo a size driven phase transition into a paraelectric phase. However, in all applications, especially in ferroelectric random access memories, ferroelectric nanograins are integrated into a circuit. They are therefore exposed to new electromechanical boundary conditions e.g. substrate strain and screening of the depolarization field in the electrodes. Carefully adapted to the respective material, some of the extrinsic effects can be used to stabilize ferroelectricity and to shrink the ultimate size. The system performance is very sensitive to the fabrication and processing procedures.

[1]  Shen,et al.  Size-related ferroelectric-domain-structure transition in a polycrystalline PbTiO3 thin film. , 1996, Physical review. B, Condensed matter.

[2]  A. Rüdiger,et al.  Pushing towards the digital storage limit , 2004, Nature materials.

[3]  R. Waser,et al.  Chemical Solution Deposition of Ferroelectric Thin Films - State of the Art and Recent Trends , 2002 .

[4]  M. Schreiter,et al.  A 11×6 element pyroelectric detector array utilizing self-polarized pzt thin films grown by sputtering , 1997 .

[5]  C. B. Sawyer,et al.  Rochelle Salt as a Dielectric , 1930 .

[6]  A Roelofs,et al.  Towards the limit of ferroelectric nanosized grains , 2003 .

[7]  P. Littlewood,et al.  LETTER TO THE EDITOR: Depolarization corrections to the coercive field in thin-film ferroelectrics , 2003 .

[8]  Tae-Young Kim,et al.  Characterization and elimination of dry etching damaged layer in Pt/Pb(Zr0.53Ti0.47)O3/Pt ferroelectric capacitor , 1999 .

[9]  F. Morrison,et al.  LETTER TO THE EDITOR: High aspect ratio piezoelectric strontium bismuth tantalate nanotubes , 2003 .

[10]  Ralf B. Wehrspohn,et al.  Nanoshell tubes of ferroelectric lead zirconate titanate and barium titanate , 2003 .

[11]  U. Gösele,et al.  Patterning and switching of nanosize ferroelectric memory cells , 1999 .

[12]  Wenhui Ma,et al.  Polarization imprint in ordered arrays of epitaxial ferroelectric nanostructures , 2004 .

[13]  U. Gösele,et al.  100-nm lateral size ferroelectric memory cells fabricated by electron-beam direct writing , 2000 .

[14]  James F. Scott,et al.  The Physics of Ferroelectric Memories , 1998 .

[15]  N. Setter,et al.  Electromechanical properties of SrBi2Ta2O9 thin films , 1997 .

[16]  H. Hada,et al.  Characteristics of 0.25 µm Ferroelectric Nonvolatile Memory with a Pb(Zr, Ti)O3 Capacitor on a Metal/Via-Stacked Plug , 2000 .

[17]  Y. Tomita,et al.  Sputtering of Lead-Based Ferroelectrics , 1993 .

[18]  J. Melngailis,et al.  Realizing intrinsic piezoresponse in epitaxial submicron lead zirconate titanate capacitors on Si , 2002 .

[19]  Seungbum Hong Nanoscale phenomena in ferroelectric thin films , 2004 .

[20]  James F. Scott,et al.  Intrinsic dielectric response in ferroelectric nano-capacitors , 2004 .

[21]  J. Melngailis,et al.  Focused ion-beam patterning of nanoscale ferroelectric capacitors , 1998 .

[22]  N. Setter,et al.  Self-polarization effect in Pb(Zr,Ti)O3 thin films , 1998 .

[23]  R. Waser,et al.  Compensation of the Parasitic Capacitance of a Scanning Force Microscope Cantilever Used for Measurements on Ferroelectric Capacitors of Submicron Size by Means of Finite Element Simulations , 2002 .

[24]  A. Kingon,et al.  Spatial inhomogeneity of imprint and switching behavior in ferroelectric capacitors , 2003 .

[25]  R. Waser,et al.  Depolarizing-field-mediated 180° switching in ferroelectric thin films with 90° domains , 2002 .

[26]  N. Okada,et al.  Crystallization and Growth Process of Lead Titanate Fine Particles from Alkoxide-Prepared Powders , 1994 .

[27]  R. Williams,et al.  Equilibrium model of bimodal distributions of epitaxial island growth. , 2003, Physical review letters.

[28]  R. W. Schwartz,et al.  Chemical solution deposition of electronic oxide films , 2004 .

[29]  H. Fujisawa,et al.  Observations of Island Structures at the Initial Growth Stage of PbZrxTi1-xO3 Thin Films Prepared by Metalorganic Chemical Vapor Deposition , 2000 .

[30]  R. Waser,et al.  Piezoresponse in the light of surface adsorbates: Relevance of defined surface conditions for perovskite materials , 2004 .

[31]  A. Tagantsev,et al.  Effect of mechanical boundary conditions on phase diagrams of epitaxial ferroelectric thin films , 1998 .

[32]  Hiroshi Tokumoto,et al.  Asymmetric nanoscale switching in ferroelectric thin films by scanning force microscopy , 2001 .

[33]  J. Scott,et al.  Perimeter effect in very small ferroelectrics , 2003 .

[34]  E. R. Fisher,et al.  Sol-gel template synthesis and characterization of BaTiO3 and PbTiO3 nanotubes , 2002 .

[35]  J F Scott,et al.  Self-patterning of arrays of ferroelectric capacitors: description by theory of substrate mediated strain interactions , 2003 .

[36]  A. Gruverman Scaling effect on statistical behavior of switching parameters of ferroelectric capacitors , 1999 .

[37]  Leslie E. Cross,et al.  SIZE EFFECTS IN NANOSTRUCTURED FERROELECTRICS , 1996 .

[38]  J. Spanier,et al.  Single‐Crystalline Barium Titanate Nanowires , 2003 .

[39]  R. Waser,et al.  In-situ compensation of the parasitic capacitance for nanoscale hysteresis measurements , 2004 .

[40]  H. Fujisawa,et al.  Ferroelectricity of the 1.7 nm-high and 38 nm-wide self-assembled PbTiO3 island , 2004 .

[41]  U. Böttger,et al.  Differentiating 180° and 90° switching of ferroelectric domains with three-dimensional piezoresponse force microscopy , 2000 .

[42]  K. Szot,et al.  Surfaces of reduced and oxidized SrTiO 3 from atomic force microscopy , 1999 .

[43]  U. Gösele,et al.  Mesoscopic ferroelectric cell arrays prepared by imprint lithography , 2003 .

[44]  V. Nagarajan,et al.  Can interface dislocations degrade ferroelectric properties , 2004 .

[45]  A. Tagantsev,et al.  Mechanical stress effect on imprint behavior of integrated ferroelectric capacitors , 2003 .

[46]  H. Fujisawa,et al.  Self-Assembled PbTiO3 Nano-Islands Prepared on SrTiO3 by Metalorganic Chemical Vapor Deposition , 2003 .

[47]  J. Osman,et al.  Landau theory of second-order phase transitions in ferroelectric films , 2001 .

[48]  V. Nagarajan,et al.  Finite element modeling of piezoresponse in nanostructured ferroelectric films , 2004 .

[49]  A. Gruverman,et al.  Nanoscale Characterisation of Ferroelectric Materials , 2004 .

[50]  Shuangye Yin,et al.  Ferroelectricity in Free Niobium Clusters , 2003, Science.

[51]  K. Szot,et al.  Localized metallic conductivity and self-healing during thermal reduction of SrTiO3. , 2002, Physical review letters.

[52]  Hongkun Park,et al.  Synthesis of single-crystalline perovskite nanorods composed of barium titanate and strontium titanate. , 2002, Journal of the American Chemical Society.

[53]  R. Scholz,et al.  Ferroelectric epitaxial nanocrystals obtained by a self-patterning method , 2003 .

[54]  Paul Muralt,et al.  Texture control of PbTiO3 and Pb(Zr,Ti)O3 thin films with TiO2 seeding , 1998 .

[55]  Robert M. Bowman,et al.  Characteristics of single crystal “thin film” capacitor structures made using a focused ion beam microscope , 2004 .

[56]  Rainer Waser,et al.  Direct hysteresis measurements of single nanosized ferroelectric capacitors contacted with an atomic force microscope , 2001 .

[57]  G. Arlt,et al.  Dielectric properties of fine‐grained barium titanate ceramics , 1985 .

[58]  U. Gösele,et al.  Well-ordered arrays of pyramid-shaped ferroelectric BaTiO3 nanostructures , 2003 .

[59]  James F. Scott,et al.  Dielectric loss peak due to platinum electrode porosity in lead zirconate titanate thin-film capacitors , 2002 .

[60]  J. Melngailis,et al.  Scaling of ferroelectric and piezoelectric properties in Pt/SrBi2Ta2O9/Pt thin films , 1999 .

[61]  Paul Muralt,et al.  Lithography-modulated self-assembly of small ferroelectric Pb(Zr, Ti)O3 single crystals , 2004 .

[62]  Chattopadhyay,et al.  Size-induced diffuse phase transition in the nanocrystalline ferroelectric PbTiO3. , 1995, Physical review. B, Condensed matter.

[63]  L. M. Schiavone,et al.  Metal Deposition By Electron Beam Exposure Of An Organometallic Film , 1986, Advanced Lithography.

[64]  D. Ohlberg,et al.  Thermodynamics of the size and shape of nanocrystals: epitaxial Ge on Si(001). , 2000, Annual review of physical chemistry.

[65]  Paul Muralt,et al.  Size effect in mesoscopic epitaxial ferroelectric structures: Increase of piezoelectric response with decreasing feature size , 2002 .

[66]  R. V. Duyne,et al.  Nanosphere lithography: A materials general fabrication process for periodic particle array surfaces , 1995 .

[67]  J. Junquera,et al.  Critical thickness for ferroelectricity in perovskite ultrathin films , 2003, Nature.

[68]  Okada,et al.  Size effect on the ferroelectric phase transition in PbTiO3 ultrafine particles. , 1988, Physical review. B, Condensed matter.

[69]  T. Shiosaki,et al.  Fabrication of ferroelectric Bi4Ti3O12 thin films and micropatterns by means of chemical solution decomposition and electron beam irradiation , 1997 .

[70]  R. Waser,et al.  Piezoresponse force microscopy of lead titanate nanograins possibly reaching the limit of ferroelectricity , 2002 .

[71]  S. R. Smith,et al.  Landau theory of the size-driven phase transition in ferroelectrics , 1995 .

[72]  J. Melngailis,et al.  Scaling of ferroelectric properties in thin films , 1999 .

[73]  U. Gösele,et al.  Impact of misfit dislocations on the polarization instability of epitaxial nanostructured ferroelectric perovskites , 2004, Nature materials.

[74]  X. Pan,et al.  Evolution of dislocation arrays in epitaxial BaTiO3 thin films grown on (100) SrTiO3 , 2004 .

[75]  Zhong,et al.  Lateral size effects on cells in ferroelectric films. , 1995, Physical review. B, Condensed matter.

[76]  Wang,et al.  Phenomenological study of the size effect on phase transitions in ferroelectric particles. , 1994, Physical review. B, Condensed matter.

[77]  Wang,et al.  Thickness dependence of the dielectric susceptibility of ferroelectric thin films. , 1994, Physical review. B, Condensed matter.

[78]  J. Speck,et al.  Microstructural instability in single-crystal thin films , 1996 .

[79]  U. Gösele,et al.  Polarization imprint and size effects in mesoscopic ferroelectric structures , 2001 .

[80]  B. Jiang,et al.  Phase transition in PbTiO3 ultrafine particles of different sizes , 1993 .

[81]  R. Waser,et al.  Advanced chemical deposition techniques - from research to production , 2001 .