THE ADSORPTION AND DESORPTION PROCESSES ACCOMPANYING THE CHEMICAL VAPOUR DEPOSITION OF SILANE ON Cu(111) AND Ni(111)

The adsorption and desorption processes accompanying the deposition of silane on Cu(111) and Ni(111) have been investigated using work function change (Δϕ), Auger electron spectroscopy (AES) and thermal desorption spectroscopy (TDS). In the early stages of deposition (0–2 L), at 130 K, on the Cu(111) surface, a predominantly hydrogenic phase forms. Heating the saturated surface to Ts>400 K produces a two-phase system: Cu2Si alloy and clean Cu(111). The regenerated Cu(111) phase extends across (16 ± 1)% of the total surface area and this process of clean surface generation can be repeated by redosing onto the mixed phase surface. The temperature coefficient of the work function of the Cu2Si alloy surface is -(7 ± 2) × 10-5 eV/K. Dosing silane onto the 110 K Ni(111) surface to saturation deposits a relatively small amount (0.05 ML) of Si. However, the Δϕ and TDS spectra are significantly distorted from their pure H/Ni(111) counterparts.

[1]  D. P. Woodruff,et al.  A NIXSW structural investigation of the (√3×√3)R30°-Cu2Si surface alloy phase formed by SiH4 reaction with Cu(1 1 1) , 2001 .

[2]  L. Sun,et al.  Silane adsorption on Pd(100) – a low-temperature RAIRS study , 1999 .

[3]  R. Nuzzo,et al.  CHEMISORPTION PROPERTIES AND STRUCTURAL EVOLUTION OF PT-SI INTERMETALLIC THIN FILMS PREPARED BY THE ACTIVATED ADSORPTION OF SIH4 ON PT(111) , 1998 .

[4]  A. W. Robinson,et al.  The adsorption of silicon on Cu(111) and the initial stages of oxidation of the silicon-copper interface , 1997 .

[5]  J. R. Buckland,et al.  INTERACTION OF SILANE WITH CU(111) : SURFACE ALLOY AND MOLECULAR CHEMISORBED PHASES , 1997 .

[6]  T. Yokoyama,et al.  Adsorption and decomposition of SiH4 and surface silicide formation on Cu(111) studied by X-ray absorption fine structure spectroscopy , 1996 .

[7]  Graham,et al.  Two-dimensional silicide 5 x 3 structure on Cu(001) as seen by scanning tunneling microscopy and helium-atom scattering. , 1994, Physical Review B (Condensed Matter).

[8]  R. Nuzzo,et al.  Si-H bond activation on Cu: Reaction of silane on Cu(111) , 1993 .

[9]  A. Graham,et al.  A helium atom scattering study of the growth and structure of silane on Cu(100) , 1992 .

[10]  Rieder,et al.  Utility of Patterson synthesis for surface structural studies with atomic beam diffraction. , 1991, Physical review. B, Condensed matter.

[11]  D. Goodman,et al.  Reactions of silane with the W(110) surface , 1990 .

[12]  S. Parker,et al.  The adsorption and decomposition of silane on Cu(111) , 1990 .

[13]  L. Dubois,et al.  The activated adsorption of silane on nickel , 1988 .

[14]  R. Nuzzo,et al.  The decomposition of silane and germane on Ni(111): Implications for heterogeneous catalysis , 1985 .

[15]  W. H. Weinberg,et al.  Chemisorption geometry of hydrogen on Ni(111): Order and disorder , 1979 .

[16]  D. King.  Thermal desorption from metal surfaces: A review , 1975 .