The study on error compensation of the probe system for nano coordinate measuring machine

The probe is called the “heart” of Nano Coordinate Measuring Machine (Nano-CMM). In order to compensate the error of the probe for Nano-CMM, this paper studies the error of the probe, which is the largest source of the measurement deviation. Based on the probe system of Nano-CMM, this paper analyzes the source of the dynamic error system and the influencing factors, studies the compensation for the diameter of the probe. What's more, the paper proposes the method, which is composed of dynamic calibration of probe radius and microplane compensation method. For the sake of the effectiveness of the method, the present paper measures the outline of a concave wheel, which is measured and compared the outline of a concave wheel before and after in reverse engineering software. The results show that the method has a certain better compensation for the probe radius, but, there is existing the small discrepancies at certain points. It proves to be the method can enhance the accuracy of Nano-CMM and have a value for application.