Micromachined Low-Loss Low-Dispersion Elevated CPW for High-Speed Interconnects

In this paper, 10μ m-elevated MEMS CPWs on various substrates are presented. Effective dielectric constants of elevated CPW(ECPW) on polyimide-loaded silicon or alumina substrate are examined and characteristic impedances are also computed versus elevation height. Dispersive property of ECPW and its electromagnetic field distributions are studies through 3-D FDTD algorithm for optimum design. Attenuation of ECPW is measured with TRL calibration procedure and revealed about 3.2 dB lower than that of conventional CPW on Especially. alumina substrate imposes better attenuation than silicon.