Micro Electromechanical Filters for Signal Processing

Micro electromechanical filters based on coupled, latei al microresonators aie demonstrated This new class of MEMS has potential signal-pi messing applications for filteis which requii e narrow bandwidth (high Q ), good signal-to-noise ratio. and stable temperature and aging characteristics Both series and paallel filteis have been fabricated and tested using an off-chip modulation technique The frequency range of these filters 15 from approximately 5 kHz to on the order of I MHz. for poljsilicon miciostructuies with suspension beams having a 2 bni square cross section A series-coupled resonator pair designed for operation at atmospheric pressure, has a measured centei frequency of 18 7 kHz and a bandwidth of 1 2 kHz

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