Performance enhancement of millimetre-wave resonators using elevated CPW

A method for overcoming the poor performance exhibited by coplanar waveguide (CPW) short circuit stubs at sub-millimetre-wave frequencies is presented. The method uses a CPW with ground and signal traces elevated 5 μm above a 625 μm-thick GaAs substrate using a standard MMIC-compatible airbridge process. The elevated CPW is also shown to offer lower attenuation per unit length than a conventional CPW transmission line.

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