Microscale thermal analysis with cooled and uncooled infrared cameras

Uncooled micro-bolometer of 17 μm pitch has been successfully applied to the micro-scale thermal analysis with a newly designed optics, the emissivity corrected procedure, and the quasi-acceleration of time frame method. The spatial resolution of 11 μm in a good balance of MTF and N.A. has been achieved for the optics of VOx FPA. It enables to visualize the exothermic latent heat of freezing biological cells at a minus temperature. The emissivity corrected microscale thermal imaging using a real time direct impose-signal system is presented both with VOx and InSb FPA.

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