Solid-state capacitive pressure transducers

Abstract Solid-state capacitive pressure transducer research is reviewed. A comparison of capacitive and other types of pressure transducers is briefly presented. The design and fabrication techniques for capacitive transducers are summarized. The capacitive measurement circuits that determine the overall performance of the transducer are reviewed, with examples to illustrate the achievable characteristics. The present limitations and future trends of capacitive sensors are discussed.

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