Micromachined ultrasonic leaky wave air transducers

A method is disclosed for selecting characteristics (i.e. thickness-frequency product, length and material) of leakage plates used in ultrasonic transducers that transfer ultrasonic energy via leakage to fluid media with low acoustic impedances. High leakage efficiency and wide bandwidths are achieved by exciting the low order antisymmetric Lamb wave mode (A0) at the selected frequency in the leakage plate. Various actuator configurations that can be used to excite and detect the A0 mode in the leakage plate are described. Some embodiments employ reflector structures to intercept the leaky waves and reform them into beams normal to the plane of the leakage plate.

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