论文信息 - Structure, optical properties and thermal stability of HfErO films deposited by simultaneous RF and VHF magnetron sputtering - 字舞流文

Structure, optical properties and thermal stability of HfErO films deposited by simultaneous RF and VHF magnetron sputtering

X. M. Wu | Y. Wang | L. Zhuge | C. Jin | Z. Zhang | C. Ye | H. Zhang | H. He | Y. Yang | X. Wu | H. J. He