Micro machined gas chromatograph based on a plasma polymerised stationary phase

In this paper we present a new solution for a miniaturised, very fast and complete gas chromatographic system consisting of an injector, a separation column and a thermal conductive detector (TCD). The new 2 m column with 27 x 70 µm2 cross area is covered by a 0.5 µm thick plasma polymerised PDMS like layer. A homogeneous thickness of the stationary phase on the column walls, structured in silicon, is obtained by a PECVD process. A mixture of C1-C4 is separated within 60 seconds and the chromatogram shows tail-free peaks.