The theory and practice of high resolution scanning electron microscopy

Abstract Recent advances in instrumentation have produced the first commercial examples of what can justifiably be called high-resolution scanning electron microscopes. The key components of such instruments are a cold field emission gun, a small-gap immersion probe-forming lens, and a clean dry-pumped vacuum. The performance of these microscopes is characterized by several major features including a spatial resolution, in secondary electron mode on solid specimens, which can exceed 1 nm on a routine basis; an incident probe current density of the order of 10 6 A/cm 2 ; and the ability to maintain these levels of performance over an accelerating voltage range of from 1 to 30 keV. This combination of high resolution, high probe current, low contamination and flexible electron-optical conditions provides many new opportunities for the application of the SEM to materials science, physics, and the life sciences.