Compensation for Errors Introduced by Nonzero Fringe Densities in Phase-Measuring Interferometers

Interferometers offer rapid full aperture measurement of optics. Flats, spheres and conics can be measured to high accuracy with computer controlled systems using high density detectors. In principle, aspheres that depart from the base sphere or conic by several micrometers could also be measured. This paper demonstrates that substantial errors may be incurred and describes simple tests to evaluate the scale of those errors. The paper then discusses the error sources and presents a method for compensating for those errors.

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