Piezoelectric Resonant Temperature Sensor

This paper describes a piezoelectric resonant tuning fork designed for temperature sensor. The sensor is based on a directly detection and analyses of relationship between frequency shift and temperature change. The main working components of quartz tuning fork temperature sensor are quartz tuning fork resonator (QTFR) and driving circuit, according to the piezoelectric effect principle of quartz crystal, researching on correlative incentive mode, selecting cut type and setting electrodes reasonably, and applying finite element method and Matlab to simulate and analyze the vibration mode as well as temperature and frequency characteristic. The experimental result indicates that the sensitivity of this sensor can reach 70ppm/°C in the temperature range from -30 to 100°C, it guarantees that precision is 0.05°C, the resolution is 0.02°C, and the response time is 4S.