Low-Dissipation Silicon Tuning Fork Gyroscopes for Rate and Whole Angle Measurements
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S. A. Zotov | A. A. Trusov | A. M. Shkel | A. Shkel | A. Trusov | S. Zotov | I. Prikhodko | I. P. Prikhodko
[1] Farrokh Ayazi,et al. A Low-Power Oven-Controlled Vacuum Package Technology for High-Performance MEMS , 2009, 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems.
[2] Andrei M. Shkel,et al. Ultra-high Q silicon gyroscopes with interchangeable rate and whole angle modes of operation , 2010, 2010 IEEE Sensors.
[3] Andrei M. Shkel,et al. Versatile vacuum packaging for experimental study of resonant MEMS , 2010, 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS).
[4] Sheng-Shian Li,et al. 1.52-GHz micromechanical extensional wine-glass mode ring resonators , 2008, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.
[5] S. A. Zotov,et al. Sub-degree-per-hour silicon MEMS rate sensor with 1 million Q-factor , 2011, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference.
[6] M. Weinberg,et al. Energy loss in MEMS resonators and the impact on inertial and RF devices , 2009, TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference.
[7] M. W. Putty. A Maicromachined vibrating ring gyroscope , 1994 .
[8] Andrei M. Shkel,et al. Foucault pendulum on a chip: angle measuring silicon MEMS gyroscope , 2011, 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems.
[9] F. Ayazi,et al. A Mode-Matched Silicon-Yaw Tuning-Fork Gyroscope With Subdegree-Per-Hour Allan Deviation Bias Instability , 2008, Journal of Microelectromechanical Systems.
[10] Lv Zhi-qing,et al. Coriolis Vibratory Gyros , 2004 .
[11] Andrei M. Shkel,et al. Micromachined rate gyroscope architecture with ultra-high quality factor and improved mode ordering , 2011 .
[12] A.A. Trusov,et al. Gyroscope architecture with structurally forced anti-phase drive-mode and linearly coupled anti-phase sense-mode , 2009, TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference.
[13] A. Shkel. Type I and Type II Micromachined Vibratory Gyroscopes , 2006, 2006 IEEE/ION Position, Location, And Navigation Symposium.