Prototype microrobots for micro-positioning and micro-unmanned vehicles

The design and performance of two prototype microrobots are presented in this paper. The microrobots were implemented by surface micromachining arrays of 270 μm long, polycrystalline silicon legs across the surface of a silicon chip. The method of motion of the microrobots is designed to mimic the way six-legged insects walk. One microrobot leg design has two degrees-of-freedom motion, and the other leg design has one degree-of-freedom motion. Both microrobot designs are able to transport objects across their bellies while lying on their backs. The microrobot with one degree-of-freedom motion is able to support several times its own weight, making available the option to carry an autonomous power supply (such as a solar cell), microprocessor, control circuitry, test equipment, and sensing or surveillance devices. Results of the self-assembly of the microrobot legs using the surface tension of molten indium are also presented.

[1]  Chih-Ming Ho,et al.  A Micromachined Permalloy Magnetic Actuator Array for Micro Robotics Assembly Systems , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.

[2]  Yung-Cheng Lee,et al.  Modeling for solder self-assembled MEMS , 1998, Photonics West.

[3]  E. Yeatman,et al.  Demonstration of three-dimensional microstructure self-assembly , 1995 .

[4]  I. Shimoyama,et al.  Creation of an insect-based microrobot with an external skeleton and elastic joints , 1992, [1992] Proceedings IEEE Micro Electro Mechanical Systems.

[5]  Kristofer S. J. Pister,et al.  Surface-micromachined components for articulated microrobots , 1996 .

[6]  R. Syms.  Equilibrium of hinged and hingeless structures rotated using surface tension forces , 1995 .

[7]  Kevin F. Harsh,et al.  Solder Self-assembly for MEMS , 1998 .

[8]  Isao Shimoyama,et al.  Simple microflight mechanism on silicon wafer , 1994, Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems.

[9]  Y.C. Lee,et al.  Prototype microrobots for micro positioning in a manufacturing process and micro unmanned vehicles , 1999, Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291).

[10]  T. Hattori,et al.  Performance of a 7-mm microfabricated car , 1995 .

[11]  L. E. Cross,et al.  Piezoelectric micromotors for microrobots , 1992 .

[12]  S. Johansson.  Micromanipulation for micro- and nanomanufacturing , 1995, Proceedings 1995 INRIA/IEEE Symposium on Emerging Technologies and Factory Automation. ETFA'95.

[13]  敏男 福田,et al.  流体内マイクロ移動ロボットに関する研究 : 第1報,水中マイクロ移動ロボットの機構と遊泳実験 , 1994 .

[14]  Isao Shimoyama,et al.  Microrobot actuated by a vibration energy field , 1994 .

[15]  Victor M. Bright,et al.  Applications for surface-micromachined polysilicon thermal actuators and arrays , 1997 .

[16]  Paolo Dario,et al.  Microactuators for microrobots: a critical survey , 1992 .

[17]  I. Shimoyama,et al.  Insect-model based microrobot with elastic hinges , 1994 .

[18]  Hiroyuki Fujita,et al.  Fabrication and operation of polyimide bimorph actuators for a ciliary motion system , 1993 .