Double sided vacuum gate valve
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A double sided vacuum gate valve is provided to stably maintain the vacuum state by maintaining the closed state of a chamber and a pump even when provision of compressed air to a piston is stopped. A double sided vacuum gate valve includes a valve body, a drive plate(20), two sealing plates(30,40), at least one stopper, and a rod. Openings(11,12) connected to a chamber and a pump are formed on both sides of a lower portion of the valve body. A drive piston is provided at the upper end of the valve body. The drive plate is located inside the body and includes a guide roller facilitating the vertical movement of the drive plate inside the body. The sealing plates are located on both surfaces of the drive plate and include O-rings(31,41) for closing the openings connected to the chamber and the pump. The stopper is connected to the sealing plate and blocks the downward movement of the sealing plates prior to the drive plate by making contact with the bottom of the body prior to the drive plate. The rod is connected to an upper portion of the drive plate to move the drive plate up and down by a drive piston.