Palladium-silicide Schottky-barrier IR-CCD for SWIR applications at intermediate temperatures

A new 32 × 63 element palladium-silicide Schottky-barrier IR-CCD device is described. The device can be operated from 40 to 140K and is sensitive in the 1.0 to 3.5 µm SWIR spectral range. A typical value of the quantum efficiency coefficient is 19.1%/eV. The photoelectric barrier height is 0.34 eV.