Optimizing optical properties of reactively sputtered titanium nitride films

[1]  A. Perry,et al.  Variations in the reflectance of TiN, ZrN and HfN , 1988 .

[2]  A. Perry,et al.  The chemical analysis of TiN films: A round robin experiment , 1987 .

[3]  A. Perry,et al.  States of residual stress both in films and in their substrates , 1986 .

[4]  E Valkonen,et al.  Optical constants of thin TiN films: thickness and preparation effects. , 1986, Applied optics.

[5]  S. Schiller,et al.  Reactive high rate D.C. sputtering: Deposition rate, stoichiometry and features of TiOx and TiNx films with respect to the target mode , 1984 .

[6]  G. Mahan,et al.  Infrared absorption of thin metal films: Pt on Si , 1983 .

[7]  B. O. Seraphin,et al.  Optical properties of CVD-coated TiN, ZrN and HfN , 1982 .

[8]  B. Karlsson,et al.  Materials for solar-transmitting heat-reflecting coatings , 1981 .

[9]  M. Wittmer,et al.  Electrical characteristics of TiN contacts to N silicon , 1981 .

[10]  S. Berthier,et al.  Optical properties of substoichiometric TiNx , 1981 .

[11]  D. Gross,et al.  Antisolar and thermally insulating thin films for simple glazings , 1981 .

[12]  P. Wachter,et al.  Optical properties of TiN and ZrN , 1977 .

[13]  B. Zega,et al.  Hard decorative TiN coatings by ion plating , 1977 .

[14]  A. Christensen,et al.  A Neutron Diffraction Investigation on Single Crystals of Titanium Carbide, Titanium Nitride, and Zirconium Nitride. , 1975 .

[15]  G. Böhm,et al.  Zuordnung optischer Messgrössen zur elektronischen Bandstruktur in der Mischkristallreihe Ti(C,N) , 1972 .

[16]  L. Toth.  Transition Metal Carbides and Nitrides , 1971 .

[17]  R. L. Lincoln,et al.  Spectral reflectance of TiNx and ZrNx films as selective solar absorbers , 1977 .

[18]  L. Holland,et al.  Vacuum deposition of thin films , 1956 .