Interferometric 2D small angle generator for autocollimator calibration

Small angle generators are simple devices for providing small angles traceable to the definition of the SI-unit radian. The most accurate ones use a laser interferometer for measurement of angular displacement. Small angle generators used for autocollimator calibration usually create angles around a single axis. A two-directional angle generator would be preferable, as it could more efficiently reveal artefacts related to angular displacement across both axes, such as orthogonality of the autocollimator's measuring axes. Characterizing errors depending on one axis only would also be easier, as the setup needs to be aligned only once for studying both axes of the autocollimator. We describe a novel interferometric two-directional small angle generator which we have built and tested for autocollimator calibration. The range is ±1000'' for both axes. The estimated standard uncertainty for full range is 0.0036'' for the horizontal and 0.0053'' for the vertical direction.

[1]  M. Pisani,et al.  The new INRiM nanoangle generator , 2009 .

[2]  Valeriy V. Yashchuk,et al.  Autocollimators for Deflectometry: Current Status and Future Progress , 2009 .

[3]  T. Yandayan,et al.  High precision small angle generator for realization of the SI unit of plane angle and calibration of high precision autocollimators , 2012 .

[4]  Ralf D. Geckeler,et al.  A novel approach for extending autocollimator calibration from plane to spatial angles , 2012 .

[5]  Jack A. Stone,et al.  Uncertainties in Small-Angle Measurement Systems Used to Calibrate Angle Artifacts , 2004, Journal of research of the National Institute of Standards and Technology.

[6]  Jana Buchheim,et al.  Investigations on the spatial resolution of autocollimator-based slope measuring profilers , 2013 .

[7]  M. Krause,et al.  The new PTB angle comparator , 1998 .

[8]  G. B. nsch,et al.  Measurement of the refractive index of air and comparison with modified Edl?n's formulae , 1998 .

[9]  Jae Wan Kim,et al.  Calibration of angle artifacts and instruments using a high precision angle generator , 2013 .

[10]  Harald Bosse,et al.  A method for the in situ determination of Abbe errors and their correction , 2007 .

[11]  Okasatria Novyanto,et al.  An Approach Method to Calibrate the Autocollimator with Small Angle Measurement Range , 2016 .

[12]  Andreas Just,et al.  Calibration of high-resolution electronic autocollimators against an angle comparator , 2003 .

[13]  T Yandayan,et al.  Application of advanced shearing techniques to the calibration of autocollimators with small angle generators and investigation of error sources. , 2016, The Review of scientific instruments.

[14]  Mikko Merimaa,et al.  Traceability of Laser Frequency Calibrations at MIKES , 2007, IEEE Transactions on Instrumentation and Measurement.

[15]  Garth J. Williams,et al.  Ultra-precise characterization of LCLS hard X-ray focusing mirrors by high resolution slope measuring deflectometry. , 2012, Optics express.

[16]  Antti Lassila,et al.  MIKES fibre-coupled differential dynamic line scale interferometer , 2012 .

[17]  Antti Lassila,et al.  Design and performance of an advanced metrology building for MIKES , 2011 .

[18]  B J Eves,et al.  The NRC autocollimator calibration facility , 2013 .

[19]  Wei Gao,et al.  Design and Construction of a Surface Encoder with Dual Sine-Grids , 2007 .

[20]  A Picard,et al.  A new determination of G using two methods. , 2001, Physical review letters.