Spiral Scanning With Improved Control for Faster Imaging of AFM

One of the key barriers to an atomic force microscope (AFM) achieving high scanning speeds is its use of the traditional zig-zag raster pattern scanning technique. In this paper, we consider the use of a high-speed spiral imaging technique with an improved multi-input multi-output (MIMO) model predictive control (MPC) scheme with a damping compensator for faster scanning by an AFM. The controller's design is based on an identified MIMO model of the AFM's piezoelectric tube scanner (PTS) and it achieves a higher closed-loop bandwidth, significant damping of the resonant mode of the PTS, and reduces the cross-coupling effect between the PTS's axes. The spirals produced have particularly narrow-band frequency measures which change slowly over time, thereby making it possible for the scanner to achieve improved tracking and continuous high-speed scanning rather than being restricted to the back and forth motion of raster scanning. To evaluate the performance improvement using this proposed control scheme for spiral scanning, an experimental comparison of its scanned images with those of the open-loop condition is performed. Experimental results show that, by using the proposed method, the AFM's scanning speed is significantly increased up to 180 Hz.

[1]  Seung-Jin Han,et al.  High-speed atomic force microscope lithography using a piezo tube scanner driven by a sinusoidal waveform. , 2009, Ultramicroscopy.

[2]  Wook Hyun Kwon,et al.  Empirical frequency-domain optimal parameter estimate for black-box processes , 2006, IEEE Transactions on Circuits and Systems I: Regular Papers.

[3]  M Radmacher,et al.  Measuring the elastic properties of biological samples with the AFM. , 1997, IEEE engineering in medicine and biology magazine : the quarterly magazine of the Engineering in Medicine & Biology Society.

[4]  M. Taylor.  Dynamics of piezoelectric tube scanners for scanning probe microscopy , 1993 .

[5]  M.E.H. Benbouzid,et al.  Multivariable state-space CGPC application to induction motor control , 1997, Proceedings of the IECON'97 23rd International Conference on Industrial Electronics, Control, and Instrumentation (Cat. No.97CH36066).

[6]  L. Ljung.  Prediction error estimation methods , 2002 .

[7]  Toshio Ando,et al.  Wide-area scanner for high-speed atomic force microscopy. , 2013, The Review of scientific instruments.

[8]  Ian R. Petersen,et al.  Model predictive control of atomic force microscope for fast image scanning , 2012, 2012 IEEE 51st IEEE Conference on Decision and Control (CDC).

[9]  S.O.R. Moheimani,et al.  Achieving Subnanometer Precision in a MEMS-Based Storage Device During Self-Servo Write Process , 2008, IEEE Transactions on Nanotechnology.

[10]  S. O. Reza Moheimani,et al.  Reducing Cross-Coupling in a Compliant XY Nanopositioner for Fast and Accurate Raster Scanning , 2010, IEEE Transactions on Control Systems Technology.

[11]  Myung-Joong Youn,et al.  A new instantaneous torque control of PM synchronous motor for high performance direct drive applications , 1997, Proceedings of APEC 97 - Applied Power Electronics Conference.

[12]  Hemanshu R. Pota,et al.  Resonant controllers for smart structures , 2002 .

[13]  W. Häberle,et al.  The "millipede" - nanotechnology entering data storage , 2002 .

[14]  M. B. Zarrop,et al.  Generalized pole-placement self-tuning controller Part 1, Basic algorithm , 1987 .

[15]  H. R. Pota,et al.  Improved control of atomic force microscope for high-speed image scanning , 2012, 2012 2nd Australian Control Conference.

[16]  M Grossard,et al.  Modeling and Robust Control Strategy for a Control-Optimized Piezoelectric Microgripper , 2011, IEEE/ASME Transactions on Mechatronics.

[17]  S. O. Reza Moheimani,et al.  Resonant control of structural vibration using charge-driven piezoelectric actuators , 2005, IEEE Transactions on Control Systems Technology.

[18]  Q. Zou,et al.  A control approach to cross-coupling compensation of piezotube scanners in tapping-mode atomic force microscope imaging. , 2009, The Review of scientific instruments.

[19]  Paul Kabaila,et al.  On output-error methods for system identification , 1983 .

[20]  David Clarke,et al.  Advances in model-based predictive control , 1994 .

[21]  S Devasia,et al.  CONTROL ISSUES IN HIGH‐SPEED AFM FOR BIOLOGICAL APPLICATIONS: COLLAGEN IMAGING EXAMPLE , 2004, Asian journal of control.

[22]  G. Binnig,et al.  Single-tube three-dimensional scanner for scanning tunneling microscopy , 1986 .

[23]  Bernard Friedland,et al.  Control System Design: An Introduction to State-Space Methods , 1987 .

[24]  Kay Soon Low,et al.  Robust model predictive control and observer for direct drive applications , 2000 .

[25]  Bharath Bhikkaji,et al.  A New Scanning Method for Fast Atomic Force Microscopy , 2011, IEEE Transactions on Nanotechnology.

[26]  Ken Chen,et al.  Stochastic noise tolerance: Enhanced full state observer vs. Kalman filter from video tracking perspective , 2010 .

[27]  S O R Moheimani,et al.  High-speed cycloid-scan atomic force microscopy , 2010, Nanotechnology.

[28]  H. R. Pota,et al.  High-Speed AFM Image Scanning Using Observer-Based MPC-Notch Control , 2013, IEEE Transactions on Nanotechnology.

[29]  Vincent Hayward,et al.  Phase control approach to hysteresis reduction , 2001, IEEE Trans. Control. Syst. Technol..

[30]  Marko Bacic,et al.  Model predictive control , 2003 .

[31]  H. R. Pota,et al.  Improvement of the tracking accuracy of an AFM using MPC , 2013, 2013 IEEE 8th Conference on Industrial Electronics and Applications (ICIEA).

[32]  Sumeet S Aphale,et al.  A New Method for Robust Damping and Tracking Control of Scanning Probe Microscope Positioning Stages , 2010, IEEE Transactions on Nanotechnology.

[33]  S O Reza Moheimani,et al.  High-speed Lissajous-scan atomic force microscopy: scan pattern planning and control design issues. , 2012, The Review of scientific instruments.

[34]  Liuping Wang,et al.  Model Predictive Control System Design and Implementation Using MATLAB , 2009 .

[35]  O. Wood,et al.  Novel alignment system for imprint lithography , 2000 .

[36]  H. R. Pota,et al.  High performance control of a PZT scanner for fast nanoscale positioning of atomic force microscope , 2012, 2012 2nd Australian Control Conference.

[37]  Theodore Antonakopoulos,et al.  Nanopositioning using the spiral of Archimedes: The probe-based storage case , 2010 .

[38]  B. Bhushan,et al.  Development of AFM-based techniques to measure mechanical properties of nanoscale structures , 2002 .

[39]  Ian R. Petersen,et al.  High performance control of atomic force microscope for high-speed image scanning , 2012, 2012 12th International Conference on Control Automation Robotics & Vision (ICARCV).

[40]  S. O. Reza Moheimani,et al.  Tracking of Triangular References Using Signal Transformation for Control of a Novel AFM Scanner Stage , 2012, IEEE Transactions on Control Systems Technology.

[41]  S O Reza Moheimani,et al.  Making a commercial atomic force microscope more accurate and faster using positive position feedback control. , 2009, The Review of scientific instruments.

[42]  I. A. Mahmood,et al.  Fast spiral-scan atomic force microscopy , 2009, Nanotechnology.

[43]  Qingze Zou,et al.  Iterative control of dynamics-coupling-caused errors in piezoscanners during high-speed AFM operation , 2005, IEEE Transactions on Control Systems Technology.