Thermal microscopy of electronic materials
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[1] J. Maxwell,et al. Theory of Heat , 1892 .
[2] J. Violle. STEFAN. — Ueber die Beziehung zwischen der Wärmestrahlung und der Temperatur (Sur la relation entre le rayonnement calorifique et la température); Sitzungs berichte d. K. Akademie d. Wissenschaften in Wien, p. 84 , 1881 .
[3] H. Casimir. Note on the conduction of heat in crystals , 1938 .
[4] J. C. Jaeger,et al. Conduction of Heat in Solids , 1952 .
[5] R. J. Jenkins,et al. Flash Method of Determining Thermal Diffusivity, Heat Capacity, and Thermal Conductivity , 1961 .
[6] E. Ash,et al. Super-resolution Aperture Scanning Microscope , 1972, Nature.
[7] F. Kelemen. Pulse method for the measurement of the thermal conductivity of thin films , 1976 .
[8] I. Jánossy,et al. High resolution thermal mapping of microcircuits using nematic liquid crystals , 1981 .
[9] J. Tyson,et al. Microscopic fluorescent imaging of surface temperature profiles with 0.01 °C resolution , 1982 .
[10] C. Gerber,et al. Surface Studies by Scanning Tunneling Microscopy , 1982 .
[11] M. Isaacson,et al. Development of a 500 Å spatial resolution light microscope: I. light is efficiently transmitted through λ/16 diameter apertures , 1984 .
[12] G. Massey. Microscopy and pattern generation with scanned evanescent waves. , 1984, Applied optics.
[13] W. Denk,et al. Optical stethoscopy: Image recording with resolution λ/20 , 1984 .
[14] I. Hatta,et al. Thermal diffusivity measurement of thin films by means of an ac calorimetric method , 1985 .
[15] A. Rosencwaig,et al. Detection of thermal waves through optical reflectance , 1985 .
[16] G. Eesley,et al. Transient thermoreflectance from thin metal films , 1986, Annual Meeting Optical Society of America.
[17] A. Mandelis. Frequency modulated (FM) time delay photoacoustic and photothermal wave spectroscopies. Technique, instrumentation, and detection. Part I: Theoretical , 1986 .
[18] H. K. Wickramasinghe,et al. Scanning thermal profiler , 1986 .
[19] G. Aers,et al. Vacuum tunnelling thermopower: Normal metal electrodes , 1987 .
[20] Pohl,et al. Thermal conductivity of amorphous solids above the plateau. , 1987, Physical review. B, Condensed matter.
[21] D. R. Penn,et al. Calculations of electron inelastic mean free paths for 31 materials , 1988 .
[22] H. K. Wickramasinghe,et al. Optical absorption microscopy and spectroscopy with nanometre resolution , 1989, Nature.
[23] R. Pohl,et al. Thermal boundary resistance , 1989 .
[24] T. Klitsner,et al. Thermal conductivity of thin films: Measurements and understanding , 1989 .
[25] G. Kino,et al. Solid immersion microscope , 1990 .
[26] W. Weber,et al. Local temperature distribution in Si-MOSFETs studied by micro-raman spectroscopy , 1990, ESSDERC '90: 20th European Solid State Device Research Conference.
[27] Bude,et al. Hot-carrier luminescence in Si. , 1992, Physical review. B, Condensed matter.
[28] W. Weber,et al. Temperature distribution in Si-MOSFETs studied by micro-Raman spectroscopy , 1992 .
[29] G. Busse,et al. Thermal wave imaging with phase sensitive modulated thermography , 1992 .
[30] H. K. Wickramasinghe,et al. Scanning probe microscopy of thermal conductivity and subsurface properties , 1992 .
[31] A. Majumdar. Microscale Heat Conduction in Dielectric Thin Films , 1993 .
[32] V. Quintard,et al. Laser probing of thermal behaviour of electronic components and its application in quality and reliability testing , 1993 .
[33] P. Epperlein. Micro-Temperature Measurements on Semiconductor Laser Mirrors by Reflectance Modulation: A Newly Developed Technique for Laser Characterization , 1993 .
[34] A. Majumdar,et al. Thermal imaging using the atomic force microscope , 1993 .
[35] E. Oesterschulze,et al. Photothermal scanning near-field microscopy , 1994 .
[36] B. Twombly,et al. Simultaneous Dynamic Mechanical Analysis and Dielectric Analysis of Polymers (DMA-DEA) , 1994 .
[37] R. Pylkki,et al. Scanning Near-Field Optical Microscopy and Scanning Thermal Microscopy , 1994 .
[38] Yiying Wu,et al. Scanning thermal imaging microscopy using composite cantilever probes , 1995 .
[39] High‐resolution temperature measurement of void dynamics induced by electromigration in aluminum metallization , 1995 .
[40] K. Nikawa,et al. New Laser Beam Neating Methods Applicable to Fault Localization and Defect Detection in VLSI Devices , 1996, Proceedings of International Reliability Physics Symposium.
[41] E. Dargent,et al. The glass transition , 1996 .
[42] H. Pollock,et al. Scanning thermal microscopy: Subsurface imaging, thermal mapping of polymer blends, and localized calorimetry , 1996 .
[43] Yoshihiko Suzuki. Novel microcantilever for scanning thermal imaging microscopy , 1996 .
[44] A. Majumdar,et al. Nanofabrication of sensors on cantilever probe tips for scanning multiprobe microscopy , 1996 .
[45] H. Pollock,et al. LOCALIZED THERMAL ANALYSIS USING A MINIATURIZED RESISTIVE PROBE , 1996 .
[46] Seungmin Lee,et al. Heat transport in thin dielectric films , 1997 .
[47] J. Kash,et al. Picosecond hot electron light emission from submicron complementary metal–oxide–semiconductor circuits , 1997 .
[48] Egbert Oesterschulze,et al. Micromachined probes for high-frequency scanning force microscopy and scanning thermal microscopy , 1997, Photonics West.
[49] H. Glosch,et al. Thermal characterization of microsystems by means of high-resolution thermography , 1997 .
[50] A new method for measuring thermal conductivity of thin films , 1997 .
[51] R. M. Cramer,et al. Thermal analyses by means of scanning probe microscopy [CMOS ICs] , 1997, Proceedings of the 1997 6th International Symposium on the Physical and Failure Analysis of Integrated Circuits.
[52] E. Gmelin,et al. Sub-micrometer thermal physics An overview on SThM techniques 1 Presented at the Twelfth Ulm-Freib , 1998 .
[53] A. Majumdar,et al. Nanoscale Temperature Distributions Measured by Scanning Joule Expansion Microscopy , 1998 .
[54] A. Majumdar,et al. Scanning Joule expansion microscopy at nanometer scales , 1998 .
[55] P. Tangyunyong,et al. Backside localization of open and shorted IC interconnections , 1998, 1998 IEEE International Reliability Physics Symposium Proceedings. 36th Annual (Cat. No.98CH36173).
[56] L. Balk,et al. Failure analysis of integrated devices by scanning thermal microscopy (SThM) , 1998 .
[57] D. Benson,et al. TIVA and SEI Developments for Enhanced Front and Backside Interconnection Failure Analysis , 1999 .
[58] L. Balk,et al. Quantitative thermal conductivity measurements with nanometre resolution , 1999 .
[59] M. Asheghi,et al. Measurement of the thermal conductivity anisotropy in polyimide films , 1999 .
[60] Max J. Schulz,et al. Thermal infrared microscopy (TIM) with sub-10-μm spatial resolution , 1999, Defense, Security, and Sensing.
[61] A. Majumdar. SCANNING THERMAL MICROSCOPY , 1999, Annual Review of Materials Science.
[62] J. Charles,et al. A multimechanism model for photon generation by silicon junctions in avalanche breakdown , 1999 .
[63] M. Cardona,et al. THERMAL-CONDUCTIVITY MEASUREMENTS OF GAAS/ALAS SUPERLATTICES USING A PICOSECOND OPTICAL PUMP-AND-PROBE TECHNIQUE , 1999 .
[64] L. Balk,et al. Correlation of scanning thermal microscopy and near-field cathodoluminescence analyses on a blue GaN light emitting device , 2000 .
[65] Reijo Lehtiniemi,et al. Applications of infrared thermography in electronics research , 2000 .
[66] O. Breitenstein,et al. Lock-In IR-Thermography – A Novel Tool for Material and Device Characterization , 2001 .
[67] Roger Smith,et al. Micro-Thermal Analysis of Polymers: Current Capabilities and Future Prospects , 2001 .
[68] H. Pollock,et al. Micro-thermal analysis: techniques and applications , 2001 .
[69] R. Pease,et al. Thermal conductivity measurements of thin-film resist , 2001 .
[70] S. Jorez,et al. Surface displacement imaging by interferometry with a light emitting diode. , 2002, Applied optics.
[71] Rosalinda M. Ring,et al. Resistive interconnection localization , 2002, Proceedings of the 9th International Symposium on the Physical and Failure Analysis of Integrated Circuits (Cat. No.02TH8614).
[72] T. Yamane,et al. Measurement of thermal conductivity of silicon dioxide thin films using a 3ω method , 2002 .
[73] P. Janus,et al. Thermal characterization of copper thin films made by means of sputtering , 2003 .
[74] R. Sanderson,et al. Measurement of thermal parameters and mechanical properties of polymers by atomic force microscopy , 2003 .
[75] Y. Gianchandani,et al. Applications of a low contact force polyimide shank bolometer probe for chemical and biological diagnostics , 2003 .
[76] K. Nikawa. Optical beam induced resistance change (OBIRCH): overview and recent results , 2003, The 16th Annual Meeting of the IEEE Lasers and Electro-Optics Society, 2003. LEOS 2003..
[77] L. Balk,et al. Quantitative dynamic near-field microscopy of thermal conductivity , 2004 .
[78] R. Meckenstock,et al. Thermal expansion imaging and finite element simulation of hot lines in high power AlGaN HEMT devices , 2004 .
[79] D. Cahill,et al. Ultra-Low Thermal Conductivity in W/Al2O3 Nanolaminates , 2004, Science.
[80] J. Phang,et al. A review of laser induced techniques for microelectronic failure analysis , 2004, Proceedings of the 11th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2004 (IEEE Cat. No.04TH8743).
[81] Thermal characterization of thin film Cu interconnects for the next generation of microelectronic devices , 2004, The Ninth Intersociety Conference on Thermal and Thermomechanical Phenomena In Electronic Systems (IEEE Cat. No.04CH37543).
[82] D. Cahill. Analysis of heat flow in layered structures for time-domain thermoreflectance , 2004 .
[83] L. Balk,et al. Scanning near field thermal microscopy on a micromachined thin membrane , 2004 .
[84] Li Shi. Scanning Thermal and Thermoelectric Microscopy , 2005 .
[85] L. Balk,et al. A review of near infrared photon emission microscopy and spectroscopy , 2005, Proceedings of the 12th International Symposium on the Physical and Failure Analysis of Integrated Circuits, 2005. IPFA 2005..
[86] M. Alcoutlabi,et al. Effects of confinement on material behaviour at the nanometre size scale , 2005 .
[87] S. Volz,et al. 3ω-scanning thermal microscope , 2005 .
[88] R. Heiderhoff,et al. Investigation on the thermal distribution of nMOSFETs under different operation modes by scanning thermal microscopy , 2005, 2005 IEEE International Reliability Physics Symposium, 2005. Proceedings. 43rd Annual..
[89] K. Komvopoulos,et al. Viscoelastic properties of polymer surfaces investigated by nanoscale dynamic mechanical analysis , 2006 .
[90] Frank Altmann,et al. Lock-in thermal IR imaging using a solid immersion lens , 2006, Microelectron. Reliab..
[91] B. Gotsmann,et al. Nano-Thermomechanics: Fundamentals and Application in Data Storage Devices , 2006 .
[92] D. Sarid,et al. Scanning thermal-conductivity microscope , 2006 .
[93] Stefan Dilhaire,et al. Joule expansion imaging techniques on microlectronic devices , 2007, 2007 13th International Workshop on Thermal Investigation of ICs and Systems (THERMINIC).
[94] Scanning probe microscopy analysis of delaminated thin films , 2007 .
[95] F. Tan,et al. Thermal Management of Mobile Phone using Phase Change Material , 2007, 2007 9th Electronics Packaging Technology Conference.
[96] S. Tuli,et al. Applications of Frequency Modulated Thermal Wave Imaging For Non‐destructive Characterization , 2008 .
[97] C. Sobhan,et al. Microscale and Nanoscale Heat Transfer: Fundamentals and Engineering Applications , 2008 .
[98] R. Heiderhoff,et al. Advanced dynamic failure analysis on interconnects by vectorized Scanning Joule Expansion microscopy , 2009, 2009 16th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits.
[99] A. Schmidt,et al. A frequency-domain thermoreflectance method for the characterization of thermal properties. , 2009, The Review of scientific instruments.
[100] D. Todorović,et al. Thermal wave microscopy: fundamentals and applications , 2010 .
[101] B. Ranjbar,et al. Differential scanning calorimetry techniques: applications in biology and nanoscience. , 2010, Journal of biomolecular techniques : JBT.
[102] K. Tanaka,et al. Development of multi-channel electron spectrometer. , 2010, The Review of scientific instruments.
[103] P. Leiderer,et al. Optical temperature measurements on thin freestanding silicon membranes. , 2010, The Review of scientific instruments.
[104] T. Yagi,et al. Thermal Diffusivities of Tris(8-hydroxyquinoline)aluminum and N,N$'$-Di(1-naphthyl)-N,N$'$-diphenylbenzidine Thin Films with Sub-Hundred Nanometer Thicknesses , 2010 .
[105] S. Dilhaire,et al. Scanning thermal microscopy of individual silicon nanowires , 2011 .
[106] R. Heiderhoff,et al. Nanoscale thermally induced strain and stress analysis by complementary Scanning Thermal Microscopy Techniques , 2011, 18th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA).
[107] A. Soudi,et al. Quantitative heat dissipation characteristics in current-carrying GaN nanowires probed by combining scanning thermal microscopy and spatially resolved Raman spectroscopy. , 2011, ACS nano.
[108] P. Janus,et al. A high-resolution measurement system for novel scanning thermal microscopy resistive nanoprobes , 2011 .
[109] O. Kwon,et al. Quantitative measurement with scanning thermal microscope by preventing the distortion due to the heat transfer through the air. , 2011, ACS nano.
[110] D. Zeze,et al. Nanoscale spatial resolution probes for scanning thermal microscopy of solid state materials , 2011, 1110.6055.
[111] P. Reddy,et al. Ultra-high vacuum scanning thermal microscopy for nanometer resolution quantitative thermometry. , 2012, ACS nano.
[112] L. Balk,et al. Scanning Probe Microscopy – History, Background, and State of the Art , 2012 .
[113] C. Sow,et al. Diameter-dependent thermal transport in individual ZnO nanowires and its correlation with surface coating and defects. , 2012, Small.
[114] O. Breitenstein,et al. Application of lock-in thermography for failure analysis in integrated circuits using quantitative phase shift analysis , 2012 .
[115] Y. Scudeller,et al. Measuring thermal conductivity of thin films and coatings with the ultra-fast transient hot-strip technique , 2012 .
[116] H. Li,et al. Dynamic Near-Field Scanning Thermal Microscopy on thin films , 2013, Microelectron. Reliab..
[117] Olivier Marty,et al. Characterization of the thermal conductivity of insulating thin films by scanning thermal microscopy , 2013, Microelectron. J..
[118] M. Asheghi,et al. From the Casimir Limit to Phononic Crystals: 20 Years of Phonon Transport Studies Using Silicon-on-Insulator Technology , 2013 .
[119] Alexander A. Balandin,et al. Graphene Thermal Properties: Applications in Thermal Management and Energy Storage , 2014 .
[120] H. Riel,et al. Modelling, simulation and optimization for a SThm nanoprobe , 2014, 2014 15th International Conference on Thermal, Mechanical and Mulit-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE).
[121] Gang Chen,et al. Applied Physics Reviews Nanoscale Thermal Transport. Ii. 2003–2012 , 2022 .
[122] S. Kandlikar. Review and Projections of Integrated Cooling Systems for Three-Dimensional Integrated Circuits , 2014 .
[123] Dan Liu,et al. Profiling nanowire thermal resistance with a spatial resolution of nanometers. , 2014, Nano letters.
[124] M. R. Wagner,et al. A novel contactless technique for thermal field mapping and thermal conductivity determination: two-laser Raman thermometry. , 2013, The Review of scientific instruments.
[125] Li Shi,et al. Emerging challenges and materials for thermal management of electronics , 2014 .
[126] Youngsang Kim,et al. Characterization of nanoscale temperature fields during electromigration of nanowires , 2014, Scientific Reports.
[127] M. A. Wahab,et al. Direct Observation of Self-Heating in III–V Gate-All-Around Nanowire MOSFETs , 2015, IEEE Transactions on Electron Devices.
[128] M. Lundstrom,et al. A simple Boltzmann transport equation for ballistic to diffusive transient heat transport , 2015, 1501.05209.
[129] E. Kirk,et al. Micromagnetic simulation of exchange coupled ferri-/ferromagnetic composite in bit patterned media , 2015, 1604.01180.