Enhanced piezo-humidity sensing of Sb-doped ZnO nanowire arrays as self-powered/active humidity sensor

Abstract Room-temperature self-powered/active humidity sensing has been realized from Sb-doped ZnO nanowire (NW) arrays by coupling their piezoelectric and gas sensing characteristics. The piezoelectric output of the device acts as both the power source and the response signal against relative humidity (RH). Upon exposure to 70% RH, the piezoelectric output of Sb-doped ZnO NWs decreases from 1.35 V (10% RH) to 0.22 V, and the response is 83.70 (much higher than that of undoped ZnO).