Multiphase homodyne interferometry: analysis of some error sources.

Some sources of error with multiphase homodyne interferometry are reviewed. A major advantage over the classic two-channel approach is that the inaccuracies that originate from laser-power fluctuations and drifts are shown to be automatically compensated for by proper adjustment of the light beams.

[1]  L Mertz,et al.  Optical homodyne phase metrology. , 1989, Applied optics.

[2]  L. Rovati,et al.  Optical interferometer for gas bubble vibration measurements with Angstrom sensitivity , 1993 .

[3]  J. Wyant,et al.  Effect of piezoelectric transducer nonlinearity on phase shift interferometry. , 1987, Applied optics.

[4]  H. Frankena,et al.  Linear approximation for measurement errors in phase shifting interferometry. , 1991, Applied optics.

[5]  P L Heydemann,et al.  Determination and correction of quadrature fringe measurement errors in interferometers. , 1981, Applied optics.

[6]  Mark J. Johnson,et al.  A passive homodyne fibre vibrometer using a three-phase detector array , 1993 .

[7]  S. Ledesma,et al.  Multiphase homodyne displacement sensor , 1994 .

[8]  K. P. Birch,et al.  Optical fringe subdivision with nanometric accuracy , 1990 .

[9]  E. R. Peck,et al.  Wavelength or length measurement by reversible fringe counting. , 1953, Journal of the Optical Society of America.

[10]  J. Schwider,et al.  Digital wave-front measuring interferometry: some systematic error sources. , 1983, Applied optics.

[11]  Chris P. Brophy,et al.  Effect of intensity error correlation on the computed phase of phase-shifting interferometry , 1990 .

[12]  D. J. Brangaccio,et al.  Digital wavefront measuring interferometer for testing optical surfaces and lenses. , 1974, Applied optics.

[13]  N Streibl,et al.  Accuracy of phase shifting interferometry. , 1988, Applied optics.

[14]  S. Jacobs,et al.  Liquid level interferometer. , 1980, Applied optics.

[15]  M. J. Downs,et al.  A proposed design for a polarization-insensitive optical interferometer system with subnanometric capability , 1993 .