论文信息 - Morphology and crystallization kinetics in HfO2 thin films grown by atomic layer deposition - 字舞流文

Morphology and crystallization kinetics in HfO2 thin films grown by atomic layer deposition

Martin L. Green | W. H. Lin | D. Muller | A. See | P. Voyles | G. Wilk | H. Gong | P. Raisanen | B. Busch | M. Bude | M. Loomans | S. Lahiri | M. Ho