论文信息 - Femtosecond laser tuning of Si microring resonators by surface amorphization through a thick SiO2 cladding - 字舞流文

Femtosecond laser tuning of Si microring resonators by surface amorphization through a thick SiO2 cladding

Single femtosecond laser pulses are used to modify the surface of c-Si waveguides clad by SiO2 for permanent tuning of microring resonators. Positive, controllable resonance shifts that vary with fluence are demonstrated, inducing little loss.

R. Fedosejevs | Y. Y. Tsui | V. Van | D. Bachman | Z. Chen

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