Optical Measurement of the Dynamic Contact Process of a MEMS Inertial Switch Under High Shock Loads

In order to characterize the dynamic and microscopic contact process of a microelectromechanical system (MEMS) inertial switch under high shock loads, a high-speed camera-based optical measurement system was developed. The optical measurement system was successfully employed to visualize and characterize the responding motion of the proof mass and the contact process with the flexible electrodes. In particular, the contact process in a flexible and a rigid mode was compared to investigate the mechanisms of using flexible electrodes to extend the contact time. The constraint performance of the limiting post of the switch was demonstrated as well. Furthermore, the optical results were in fairly good agreement with the results of electrical measurement and numerical predictions.

[1]  Eberhard P. Hofer,et al.  High-speed visualization, a powerful diagnostic tool for microactuators – retrospect and prospect , 1999 .

[2]  Richard P. Wildes,et al.  A study of structure and motion in fluidic microsystems , 1997 .

[3]  Hong Wang,et al.  Analysis and elimination of the ‘skip contact’ phenomenon in an inertial micro-switch for prolonging its contact time , 2009 .

[4]  Masayoshi Esashi,et al.  Acceleration switch with extended holding time using squeeze film effect for side airbag systems , 2002 .

[6]  Christian Rembe,et al.  Optical measurement methods to study dynamic behavior in MEMS , 2001, Lasers in Metrology and Art Conservation.

[7]  Christian Rembe,et al.  Analysis of the dynamics in microactuators using high-speed cine photomicrography , 2001 .

[8]  Miao Yu,et al.  Latching in a MEMS shock sensor: Modeling and experiments , 2010 .

[9]  Richard P. Wildes,et al.  Analysis of fluidic and mechanical motion in MEMS by using high speed X-ray micro-imaging techniques , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

[10]  David Wood,et al.  A system for the dynamic characterization of microstructures , 1997 .

[11]  Hong Wang,et al.  Design, simulation and fabrication of a novel contact-enhanced MEMS inertial switch with a movable contact point , 2008 .

[12]  Liqun Du,et al.  Fabrication of novel MEMS inertial switch with six layers on a metal substrate , 2015 .

[13]  Josef Binder,et al.  Additive electroplating technology as a post-CMOS process for the production of MEMS acceleration-threshold switches for transportation applications , 2000 .

[14]  Jungwook Choi,et al.  Deformable Carbon Nanotube-Contact Pads for Inertial Microswitch to Extend Contact Time , 2012, IEEE Transactions on Industrial Electronics.

[15]  Guifu Ding,et al.  A MEMS Inertia Switch With Bridge-Type Elastic Fixed Electrode for Long Duration Contact , 2008, IEEE Transactions on Electron Devices.

[16]  Changlin Leng,et al.  A differential laser Doppler system for one-dimensional in-plane motion measurement of MEMS , 2007 .

[17]  Zhenchuan Yang,et al.  An acceleration switch with a robust latching mechanism and cylindrical contacts , 2010 .

[18]  T Tønnesen,et al.  Simulation, design and fabrication of electroplated acceleration switches , 1997 .

[19]  Cao Yun,et al.  A novel MEMS omnidirectional inertial switch with flexible electrodes , 2014 .

[20]  K. Hemker.  Microsample tensile testing of LIGA nickel for MEMS applications , 2001 .

[21]  Wei Ma,et al.  Design and characterization of inertia-activated electrical micro-switches fabricated and packaged using low-temperature photoresist molded metal-electroplating technology , 2003 .

[22]  H. F. Helbig,et al.  A system for automatic electrical and optical characterization of microelectromechanical devices , 1999 .

[23]  Yan Wang,et al.  Fabrication and Characterization of a Low-g Inertial Microswitch With Flexible Contact Point and Limit-Block Constraints , 2016, IEEE/ASME Transactions on Mechatronics.

[24]  Sylvain Petitgrand,et al.  Characterization of the static and dynamic behaviour of M(O)EMS by optical techniques: status and trends , 2003 .

[25]  Yuelin Wang,et al.  Micro-cantilever shocking-acceleration switches with threshold adjusting and 'on'-state latching functions , 2007 .

[26]  Jiong Wang,et al.  The simulation and visual test contact process of a MEMS inertial switch with flexible electrodes , 2016 .

[27]  Zhang Yong-hong.  Gray moment operators for subpixel edge detection on CCD images , 2004 .

[28]  R. Muller,et al.  Stroboscopic interferometer system for dynamic MEMS characterization , 2000, Journal of Microelectromechanical Systems.

[29]  R. Pratap,et al.  A Compact Squeeze-Film Model Including Inertia, Compressibility, and Rarefaction Effects for Perforated 3-D MEMS Structures , 2008, Journal of Microelectromechanical Systems.