Tuning the sensing range and sensitivity of three axes tactile sensors using the polymer composite membrane
暂无分享,去创建一个
[1] M. Sohgawa,et al. Fabrication and Characterization of Silicon-Polymer Beam Structures for Cantilever-Type Tactile Sensors , 2007, TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference.
[2] Yasuhisa Hasegawa,et al. An active tactile sensor for detecting mechanical characteristics of contacted objects , 2006 .
[3] Sheng-Hsiang Tseng,et al. A Highly Sensitive CMOS-MEMS Capacitive Tactile Sensor , 2006, 19th IEEE International Conference on Micro Electro Mechanical Systems.
[4] E. Hwang,et al. A Polymer-Based Flexible Tactile Sensor for Normal and Shear Load Detection , 2006, 19th IEEE International Conference on Micro Electro Mechanical Systems.
[5] Euisik Yoon,et al. A Capacitive Proximity Sensor in Dual Implementation with Tactile Imaging Capability on a Single Flexible Platform For Robot Assistant Applications , 2006, 19th IEEE International Conference on Micro Electro Mechanical Systems.
[6] K.R. Lee,et al. 3-Axes Flexible Tactile Sensor Fabricated by Si Micromachining and Packaging Technology , 2006, 19th IEEE International Conference on Micro Electro Mechanical Systems.
[7] K. Matsumoto,et al. Insertion Force Sensor by Sidewall-Doping with Rapid Thermal Diffusion , 2006, 19th IEEE International Conference on Micro Electro Mechanical Systems.
[8] Jong-Ho Kim,et al. A silicon-based flexible tactile sensor for ubiquitous robot companion applications , 2006 .
[9] T. Kamei,et al. Novel surface structure and its fabrication process for MEMS fingerprint sensor , 2005, IEEE Transactions on Electron Devices.
[10] J. Engel,et al. Polymer micromachined multimodal tactile sensors , 2005 .
[11] M. Ishida,et al. Silicon smart tactile image sensor with pneumatically swollen single diaphragm structure , 2004, 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest.
[12] M. Shikida,et al. Amicromachined active tactile sensor for hardness detection , 2004 .
[13] Satoshi Shigematsu,et al. MEMS fingerprint sensor immune to various finger surface conditions , 2003 .
[14] Chang Liu,et al. Development of polyimide flex-ible tactile sensor skin , 2003 .
[15] Weileun Fang,et al. Determining the Poisson’s ratio of thin film materials using resonant method , 2003 .
[16] Mitsuhiro Shikida,et al. Active tactile sensor for detecting contact force and hardness of an object , 2003 .
[17] G. Zimmer,et al. New tactile sensor chip with silicone rubber cover , 2000 .
[18] Thomas W. Kenny,et al. Independent detection of vertical and lateral forces with a sidewall-implanted dual-axis piezoresistive cantilever , 1998 .
[19] Gregory T. A. Kovacs,et al. A CMOS Compatible Traction Stress Sensing Element For Use In High Resolution Tactile Imaging , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.