Mass balancing and spring element manipulation of micromechanical silicon-gyrometers with ultrashort laser pulses
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A. Ostendorf | U. Stute | U. Klug | B. Rahn
[1] Mohamed Chaker,et al. Laser-ablated volume and depth as a function of pulse duration in aluminum targets. , 2005, Applied optics.
[2] H. Seidel,et al. Silicon angular rate sensor for automotive applications with piezoelectric drive and piezoresistive read-out , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).
[3] A. Tünnermann,et al. Femtosecond, picosecond and nanosecond laser ablation of solids , 1996 .
[4] Lagendijk,et al. Effect of a nonthermal electron distribution on the electron-phonon energy relaxation process in noble metals. , 1992, Physical review. B, Condensed matter.
[5] Roberto Horowitz,et al. Adaptive controller design of MEMS gyroscopes , 2001, ITSC 2001. 2001 IEEE Intelligent Transportation Systems. Proceedings (Cat. No.01TH8585).
[6] Boris N. Chichkov,et al. Short-pulse laser ablation of solid targets , 1996 .
[7] Gerard M. O'Connor,et al. Study of femtosecond laser interaction with wafer-grade silicon , 2003, SPIE OPTO-Ireland.
[8] Andreas Ostendorf,et al. Structuring silicon with femtosecond lasers , 2001, SPIE LASE.
[9] Gary K. Fedder,et al. Integrated Microelectromechanical Gyroscopes , 2003 .
[10] Vijay K. Varadan. Micromachined Gyroscopes: Challenges, Design Solutions, and Opportunities , 2003 .