论文信息 - Very Large Scale Integration of MOEMS Mirrors, MEMS Angular Amplifiers and High-voltage, High-density IC Electronics for Photonic Switching - 字舞流文

Very Large Scale Integration of MOEMS Mirrors, MEMS Angular Amplifiers and High-voltage, High-density IC Electronics for Photonic Switching

Janusz Bryzek | Mitchell J. Novack | E Chen | Anthony Francis Flannery | J Garate | H Kwon | David Lambe Marx | Steven S. Nasiri | Sigari El