论文信息 - Simultaneous thickness and thermal conductivity measurements of thinned silicon from 100 nm to 17 μm - 字舞流文

Simultaneous thickness and thermal conductivity measurements of thinned silicon from 100 nm to 17 μm

M. Asheghi | K. Goodson | D. Adams | Elbara Ziade | P. Hopkins | Christopher B. Saltonstall | D. Leonhardt | Ethan A. Scott | Christopher Perez | V. Carter Hodges