Deposition and Characterization of In-Situ Boron Doped Polycrystalline Silicon Films for Microelectromechanical Systems Applications
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Mehran Mehregany | Christian A. Zorman | J. M. Melzak | M. Mehregany | C. Zorman | J. Melzak | J. McMahon | J. J. McMahon | Juyong Chung | Juyong Chung
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